7/31/2011	12:03:33 AM	Helium valve closed
7/31/2011	12:03:33 AM	PH3 valve closed
7/31/2011	12:03:33 AM	Main Vac valve closed
7/31/2011	12:03:33 AM	Bypass valve closed
7/31/2011	12:03:33 AM	H2 valve opened
7/31/2011	12:03:33 AM	BCl3 valve opened
7/31/2011	12:03:33 AM	SiCl4 pre valve opened
7/31/2011	12:03:33 AM	SiCl4 post valve opened
7/31/2011	12:03:33 AM	Bubbler valve opened
7/31/2011	12:03:33 AM	Helium MFC set to  0.000000
7/31/2011	12:03:33 AM	H2 MFC set to  500.000000
7/31/2011	12:03:33 AM	BCl3 MFC set to  2.000000
7/31/2011	12:03:33 AM	PHl3 MFC set to  0.000000
7/31/2011	12:03:33 AM	SiCl4 MFC set to  50.000000
7/31/2011	12:03:33 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	12:03:33 AM	Tube furnace set to 1000
7/31/2011	12:18:33 AM	Helium valve closed
7/31/2011	12:18:33 AM	PH3 valve closed
7/31/2011	12:18:33 AM	Main Vac valve closed
7/31/2011	12:18:33 AM	Bypass valve closed
7/31/2011	12:18:33 AM	H2 valve opened
7/31/2011	12:18:33 AM	BCl3 valve opened
7/31/2011	12:18:33 AM	SiCl4 pre valve opened
7/31/2011	12:18:33 AM	SiCl4 post valve opened
7/31/2011	12:18:33 AM	Bubbler valve opened
7/31/2011	12:18:33 AM	Helium MFC set to  0.000000
7/31/2011	12:18:33 AM	H2 MFC set to  500.000000
7/31/2011	12:18:33 AM	BCl3 MFC set to  12.000000
7/31/2011	12:18:33 AM	PHl3 MFC set to  0.000000
7/31/2011	12:18:33 AM	SiCl4 MFC set to  50.000000
7/31/2011	12:18:33 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	12:18:34 AM	Tube furnace set to 1000
7/31/2011	12:18:44 AM	Helium valve closed
7/31/2011	12:18:44 AM	BCl3 valve closed
7/31/2011	12:18:44 AM	PH3 valve closed
7/31/2011	12:18:44 AM	SiCl4 pre valve closed
7/31/2011	12:18:44 AM	SiCl4 post valve closed
7/31/2011	12:18:44 AM	Main Vac valve closed
7/31/2011	12:18:44 AM	Bypass valve closed
7/31/2011	12:18:44 AM	H2 valve opened
7/31/2011	12:18:44 AM	Bubbler valve opened
7/31/2011	12:18:44 AM	Helium MFC set to  0.000000
7/31/2011	12:18:44 AM	H2 MFC set to  500.000000
7/31/2011	12:18:44 AM	BCl3 MFC set to  0.000000
7/31/2011	12:18:44 AM	PHl3 MFC set to  0.000000
7/31/2011	12:18:44 AM	SiCl4 MFC set to  0.000000
7/31/2011	12:18:44 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	12:18:44 AM	Tube furnace set to 975
7/31/2011	12:19:44 AM	Helium valve closed
7/31/2011	12:19:44 AM	BCl3 valve closed
7/31/2011	12:19:44 AM	PH3 valve closed
7/31/2011	12:19:44 AM	SiCl4 pre valve closed
7/31/2011	12:19:44 AM	SiCl4 post valve closed
7/31/2011	12:19:44 AM	Main Vac valve closed
7/31/2011	12:19:44 AM	Bypass valve closed
7/31/2011	12:19:44 AM	H2 valve opened
7/31/2011	12:19:44 AM	Bubbler valve opened
7/31/2011	12:19:44 AM	Helium MFC set to  0.000000
7/31/2011	12:19:44 AM	H2 MFC set to  500.000000
7/31/2011	12:19:44 AM	BCl3 MFC set to  0.000000
7/31/2011	12:19:44 AM	PHl3 MFC set to  0.000000
7/31/2011	12:19:44 AM	SiCl4 MFC set to  0.000000
7/31/2011	12:19:44 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	12:19:44 AM	Tube furnace set to 950
7/31/2011	12:20:44 AM	Helium valve closed
7/31/2011	12:20:44 AM	BCl3 valve closed
7/31/2011	12:20:44 AM	PH3 valve closed
7/31/2011	12:20:44 AM	SiCl4 pre valve closed
7/31/2011	12:20:44 AM	SiCl4 post valve closed
7/31/2011	12:20:44 AM	Main Vac valve closed
7/31/2011	12:20:44 AM	Bypass valve closed
7/31/2011	12:20:44 AM	H2 valve opened
7/31/2011	12:20:44 AM	Bubbler valve opened
7/31/2011	12:20:44 AM	Helium MFC set to  0.000000
7/31/2011	12:20:44 AM	H2 MFC set to  500.000000
7/31/2011	12:20:44 AM	BCl3 MFC set to  0.000000
7/31/2011	12:20:44 AM	PHl3 MFC set to  0.000000
7/31/2011	12:20:44 AM	SiCl4 MFC set to  0.000000
7/31/2011	12:20:44 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	12:20:44 AM	Tube furnace set to 925
7/31/2011	12:21:44 AM	Helium valve closed
7/31/2011	12:21:44 AM	BCl3 valve closed
7/31/2011	12:21:44 AM	PH3 valve closed
7/31/2011	12:21:44 AM	SiCl4 pre valve closed
7/31/2011	12:21:44 AM	SiCl4 post valve closed
7/31/2011	12:21:44 AM	Main Vac valve closed
7/31/2011	12:21:44 AM	Bypass valve closed
7/31/2011	12:21:44 AM	H2 valve opened
7/31/2011	12:21:44 AM	Bubbler valve opened
7/31/2011	12:21:44 AM	Helium MFC set to  0.000000
7/31/2011	12:21:44 AM	H2 MFC set to  500.000000
7/31/2011	12:21:44 AM	BCl3 MFC set to  0.000000
7/31/2011	12:21:44 AM	PHl3 MFC set to  0.000000
7/31/2011	12:21:44 AM	SiCl4 MFC set to  0.000000
7/31/2011	12:21:44 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	12:21:44 AM	Tube furnace set to 900
7/31/2011	12:22:44 AM	Helium valve closed
7/31/2011	12:22:44 AM	BCl3 valve closed
7/31/2011	12:22:44 AM	PH3 valve closed
7/31/2011	12:22:44 AM	SiCl4 pre valve closed
7/31/2011	12:22:44 AM	SiCl4 post valve closed
7/31/2011	12:22:44 AM	Main Vac valve closed
7/31/2011	12:22:44 AM	Bypass valve closed
7/31/2011	12:22:44 AM	H2 valve opened
7/31/2011	12:22:44 AM	Bubbler valve opened
7/31/2011	12:22:44 AM	Helium MFC set to  0.000000
7/31/2011	12:22:44 AM	H2 MFC set to  500.000000
7/31/2011	12:22:44 AM	BCl3 MFC set to  0.000000
7/31/2011	12:22:44 AM	PHl3 MFC set to  0.000000
7/31/2011	12:22:44 AM	SiCl4 MFC set to  0.000000
7/31/2011	12:22:44 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	12:22:45 AM	Tube furnace set to 850
7/31/2011	12:24:15 AM	H2 valve closed
7/31/2011	12:24:15 AM	BCl3 valve closed
7/31/2011	12:24:15 AM	PH3 valve closed
7/31/2011	12:24:15 AM	SiCl4 pre valve closed
7/31/2011	12:24:15 AM	SiCl4 post valve closed
7/31/2011	12:24:15 AM	Main Vac valve closed
7/31/2011	12:24:15 AM	Bypass valve closed
7/31/2011	12:24:15 AM	Helium valve opened
7/31/2011	12:24:15 AM	Bubbler valve opened
7/31/2011	12:24:15 AM	Helium MFC set to  500.000000
7/31/2011	12:24:15 AM	H2 MFC set to  0.000000
7/31/2011	12:24:15 AM	BCl3 MFC set to  0.000000
7/31/2011	12:24:15 AM	PHl3 MFC set to  0.000000
7/31/2011	12:24:15 AM	SiCl4 MFC set to  0.000000
7/31/2011	12:24:15 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	12:24:15 AM	Tube furnace set to 800
7/31/2011	12:25:45 AM	H2 valve closed
7/31/2011	12:25:45 AM	BCl3 valve closed
7/31/2011	12:25:45 AM	PH3 valve closed
7/31/2011	12:25:45 AM	SiCl4 pre valve closed
7/31/2011	12:25:45 AM	SiCl4 post valve closed
7/31/2011	12:25:45 AM	Main Vac valve closed
7/31/2011	12:25:45 AM	Bypass valve closed
7/31/2011	12:25:45 AM	Helium valve opened
7/31/2011	12:25:45 AM	Bubbler valve opened
7/31/2011	12:25:45 AM	Helium MFC set to  500.000000
7/31/2011	12:25:45 AM	H2 MFC set to  0.000000
7/31/2011	12:25:45 AM	BCl3 MFC set to  0.000000
7/31/2011	12:25:45 AM	PHl3 MFC set to  0.000000
7/31/2011	12:25:45 AM	SiCl4 MFC set to  0.000000
7/31/2011	12:25:45 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	12:25:45 AM	Tube furnace set to 0
7/31/2011	12:45:45 AM	Helium valve closed
7/31/2011	12:45:45 AM	H2 valve closed
7/31/2011	12:45:45 AM	BCl3 valve closed
7/31/2011	12:45:45 AM	PH3 valve closed
7/31/2011	12:45:45 AM	SiCl4 pre valve closed
7/31/2011	12:45:45 AM	SiCl4 post valve closed
7/31/2011	12:45:45 AM	Main Vac valve closed
7/31/2011	12:45:45 AM	Bypass valve closed
7/31/2011	12:45:45 AM	Bubbler valve closed
7/31/2011	12:45:45 AM	Helium MFC set to  0.000000
7/31/2011	12:45:45 AM	H2 MFC set to  0.000000
7/31/2011	12:45:45 AM	BCl3 MFC set to  0.000000
7/31/2011	12:45:45 AM	PHl3 MFC set to  0.000000
7/31/2011	12:45:45 AM	SiCl4 MFC set to  0.000000
7/31/2011	12:45:45 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	12:45:45 AM	Tube furnace set to 0
7/31/2011	1:25:45 AM	Run finished at 1:25 AM
7/31/2011	2:34:53 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/31/2011	2:34:54 AM	Recipe started at 2:34 AM
7/31/2011	2:34:54 AM	Helium valve closed
7/31/2011	2:34:54 AM	H2 valve closed
7/31/2011	2:34:54 AM	BCl3 valve closed
7/31/2011	2:34:54 AM	PH3 valve closed
7/31/2011	2:34:54 AM	SiCl4 pre valve closed
7/31/2011	2:34:54 AM	SiCl4 post valve closed
7/31/2011	2:34:54 AM	Main Vac valve closed
7/31/2011	2:34:54 AM	Bypass valve closed
7/31/2011	2:34:54 AM	Bubbler valve closed
7/31/2011	2:34:54 AM	Helium MFC set to  0.000000
7/31/2011	2:34:54 AM	H2 MFC set to  0.000000
7/31/2011	2:34:54 AM	BCl3 MFC set to  0.000000
7/31/2011	2:34:54 AM	PHl3 MFC set to  0.000000
7/31/2011	2:34:54 AM	SiCl4 MFC set to  0.000000
7/31/2011	2:34:54 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	2:34:54 AM	Tube furnace set to 0
7/31/2011	2:34:57 AM	H2 valve closed
7/31/2011	2:34:57 AM	BCl3 valve closed
7/31/2011	2:34:57 AM	PH3 valve closed
7/31/2011	2:34:57 AM	SiCl4 pre valve closed
7/31/2011	2:34:57 AM	SiCl4 post valve closed
7/31/2011	2:34:57 AM	Main Vac valve closed
7/31/2011	2:34:57 AM	Bypass valve closed
7/31/2011	2:34:57 AM	Bubbler valve closed
7/31/2011	2:34:57 AM	Helium valve opened
7/31/2011	2:34:57 AM	Helium MFC set to  500.000000
7/31/2011	2:34:57 AM	H2 MFC set to  0.000000
7/31/2011	2:34:57 AM	BCl3 MFC set to  0.000000
7/31/2011	2:34:57 AM	PHl3 MFC set to  0.000000
7/31/2011	2:34:57 AM	SiCl4 MFC set to  0.000000
7/31/2011	2:34:57 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	2:34:58 AM	Tube furnace set to 0
7/31/2011	2:35:02 AM	Helium valve closed
7/31/2011	2:35:02 AM	H2 valve closed
7/31/2011	2:35:02 AM	BCl3 valve closed
7/31/2011	2:35:02 AM	PH3 valve closed
7/31/2011	2:35:02 AM	SiCl4 pre valve closed
7/31/2011	2:35:02 AM	SiCl4 post valve closed
7/31/2011	2:35:02 AM	Main Vac valve closed
7/31/2011	2:35:02 AM	Bypass valve closed
7/31/2011	2:35:02 AM	Bubbler valve closed
7/31/2011	2:35:02 AM	Helium MFC set to  0.000000
7/31/2011	2:35:02 AM	H2 MFC set to  0.000000
7/31/2011	2:35:02 AM	BCl3 MFC set to  0.000000
7/31/2011	2:35:02 AM	PHl3 MFC set to  0.000000
7/31/2011	2:35:02 AM	SiCl4 MFC set to  0.000000
7/31/2011	2:35:02 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	2:35:02 AM	Tube furnace set to 0
7/31/2011	2:35:03 AM	Run finished at 2:35 AM
7/31/2011	2:35:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/31/2011	2:39:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/31/2011	2:39:35 AM	Recipe started at 2:39 AM
7/31/2011	2:39:35 AM	Helium valve closed
7/31/2011	2:39:35 AM	H2 valve closed
7/31/2011	2:39:35 AM	BCl3 valve closed
7/31/2011	2:39:35 AM	PH3 valve closed
7/31/2011	2:39:35 AM	SiCl4 pre valve closed
7/31/2011	2:39:35 AM	SiCl4 post valve closed
7/31/2011	2:39:35 AM	Main Vac valve closed
7/31/2011	2:39:35 AM	Bubbler valve closed
7/31/2011	2:39:35 AM	Bypass valve opened
7/31/2011	2:39:35 AM	Helium MFC set to  0.000000
7/31/2011	2:39:35 AM	H2 MFC set to  0.000000
7/31/2011	2:39:35 AM	BCl3 MFC set to  0.000000
7/31/2011	2:39:35 AM	PHl3 MFC set to  0.000000
7/31/2011	2:39:35 AM	SiCl4 MFC set to  0.000000
7/31/2011	2:39:35 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	2:39:36 AM	Tube furnace set to 0
7/31/2011	2:40:39 AM	Helium valve closed
7/31/2011	2:40:39 AM	H2 valve closed
7/31/2011	2:40:39 AM	BCl3 valve closed
7/31/2011	2:40:39 AM	PH3 valve closed
7/31/2011	2:40:39 AM	SiCl4 pre valve closed
7/31/2011	2:40:39 AM	SiCl4 post valve closed
7/31/2011	2:40:39 AM	Main Vac valve closed
7/31/2011	2:40:39 AM	Bubbler valve closed
7/31/2011	2:40:39 AM	Bypass valve opened
7/31/2011	2:40:39 AM	Helium MFC set to  0.000000
7/31/2011	2:40:39 AM	H2 MFC set to  0.000000
7/31/2011	2:40:39 AM	BCl3 MFC set to  0.000000
7/31/2011	2:40:39 AM	PHl3 MFC set to  0.000000
7/31/2011	2:40:39 AM	SiCl4 MFC set to  0.000000
7/31/2011	2:40:39 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	2:40:39 AM	Tube furnace set to 0
7/31/2011	2:41:39 AM	Helium valve closed
7/31/2011	2:41:39 AM	H2 valve closed
7/31/2011	2:41:39 AM	BCl3 valve closed
7/31/2011	2:41:39 AM	PH3 valve closed
7/31/2011	2:41:39 AM	SiCl4 pre valve closed
7/31/2011	2:41:39 AM	SiCl4 post valve closed
7/31/2011	2:41:39 AM	Bypass valve closed
7/31/2011	2:41:39 AM	Bubbler valve closed
7/31/2011	2:41:39 AM	Main Vac valve opened
7/31/2011	2:41:39 AM	Helium MFC set to  0.000000
7/31/2011	2:41:39 AM	H2 MFC set to  0.000000
7/31/2011	2:41:39 AM	BCl3 MFC set to  0.000000
7/31/2011	2:41:39 AM	PHl3 MFC set to  0.000000
7/31/2011	2:41:39 AM	SiCl4 MFC set to  0.000000
7/31/2011	2:41:39 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	2:41:39 AM	Tube furnace set to 0
7/31/2011	2:41:40 AM	Run finished at 2:41 AM
7/31/2011	2:41:40 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/31/2011	2:46:32 AM	Tube furnace set to 120
7/31/2011	2:48:50 AM	Main Vac valve closed
7/31/2011	2:48:55 AM	Main Vac valve opened
7/31/2011	3:07:44 AM	Main Vac valve closed
7/31/2011	3:07:54 AM	Main Vac valve opened
7/31/2011	3:10:22 AM	Recipe started at 3:10 AM
7/31/2011	3:10:22 AM	Helium valve closed
7/31/2011	3:10:22 AM	H2 valve closed
7/31/2011	3:10:22 AM	BCl3 valve closed
7/31/2011	3:10:22 AM	PH3 valve closed
7/31/2011	3:10:22 AM	SiCl4 pre valve closed
7/31/2011	3:10:22 AM	SiCl4 post valve closed
7/31/2011	3:10:22 AM	Main Vac valve closed
7/31/2011	3:10:22 AM	Bypass valve closed
7/31/2011	3:10:22 AM	Bubbler valve closed
7/31/2011	3:10:22 AM	Helium MFC set to  0.000000
7/31/2011	3:10:22 AM	H2 MFC set to  0.000000
7/31/2011	3:10:22 AM	BCl3 MFC set to  0.000000
7/31/2011	3:10:22 AM	PHl3 MFC set to  0.000000
7/31/2011	3:10:22 AM	SiCl4 MFC set to  0.000000
7/31/2011	3:10:22 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	3:10:22 AM	Tube furnace set to 0
7/31/2011	3:10:25 AM	Helium valve closed
7/31/2011	3:10:25 AM	BCl3 valve closed
7/31/2011	3:10:25 AM	PH3 valve closed
7/31/2011	3:10:25 AM	SiCl4 pre valve closed
7/31/2011	3:10:25 AM	SiCl4 post valve closed
7/31/2011	3:10:25 AM	Main Vac valve closed
7/31/2011	3:10:25 AM	Bypass valve closed
7/31/2011	3:10:25 AM	Bubbler valve closed
7/31/2011	3:10:25 AM	H2 valve opened
7/31/2011	3:10:25 AM	Helium MFC set to  0.000000
7/31/2011	3:10:25 AM	H2 MFC set to  500.000000
7/31/2011	3:10:25 AM	BCl3 MFC set to  0.000000
7/31/2011	3:10:25 AM	PHl3 MFC set to  0.000000
7/31/2011	3:10:25 AM	SiCl4 MFC set to  0.000000
7/31/2011	3:10:25 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	3:10:26 AM	Tube furnace set to 0
7/31/2011	3:11:30 AM	Helium valve closed
7/31/2011	3:11:30 AM	BCl3 valve closed
7/31/2011	3:11:30 AM	PH3 valve closed
7/31/2011	3:11:30 AM	SiCl4 pre valve closed
7/31/2011	3:11:30 AM	SiCl4 post valve closed
7/31/2011	3:11:30 AM	Main Vac valve closed
7/31/2011	3:11:30 AM	Bypass valve closed
7/31/2011	3:11:30 AM	H2 valve opened
7/31/2011	3:11:30 AM	Bubbler valve opened
7/31/2011	3:11:30 AM	Helium MFC set to  0.000000
7/31/2011	3:11:30 AM	H2 MFC set to  500.000000
7/31/2011	3:11:30 AM	BCl3 MFC set to  0.000000
7/31/2011	3:11:30 AM	PHl3 MFC set to  0.000000
7/31/2011	3:11:30 AM	SiCl4 MFC set to  0.000000
7/31/2011	3:11:30 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	3:11:30 AM	Tube furnace set to 0
7/31/2011	3:11:31 AM	Helium valve closed
7/31/2011	3:11:31 AM	BCl3 valve closed
7/31/2011	3:11:31 AM	PH3 valve closed
7/31/2011	3:11:31 AM	SiCl4 pre valve closed
7/31/2011	3:11:31 AM	SiCl4 post valve closed
7/31/2011	3:11:31 AM	Main Vac valve closed
7/31/2011	3:11:31 AM	Bypass valve closed
7/31/2011	3:11:31 AM	H2 valve opened
7/31/2011	3:11:31 AM	Bubbler valve opened
7/31/2011	3:11:31 AM	Helium MFC set to  0.000000
7/31/2011	3:11:31 AM	H2 MFC set to  500.000000
7/31/2011	3:11:31 AM	BCl3 MFC set to  0.000000
7/31/2011	3:11:31 AM	PHl3 MFC set to  0.000000
7/31/2011	3:11:31 AM	SiCl4 MFC set to  0.000000
7/31/2011	3:11:31 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	3:11:31 AM	Tube furnace set to 1000
7/31/2011	3:31:31 AM	Helium valve closed
7/31/2011	3:31:31 AM	PH3 valve closed
7/31/2011	3:31:31 AM	Main Vac valve closed
7/31/2011	3:31:31 AM	Bypass valve closed
7/31/2011	3:31:31 AM	H2 valve opened
7/31/2011	3:31:31 AM	BCl3 valve opened
7/31/2011	3:31:31 AM	SiCl4 pre valve opened
7/31/2011	3:31:31 AM	SiCl4 post valve opened
7/31/2011	3:31:31 AM	Bubbler valve opened
7/31/2011	3:31:31 AM	Helium MFC set to  0.000000
7/31/2011	3:31:31 AM	H2 MFC set to  500.000000
7/31/2011	3:31:31 AM	BCl3 MFC set to  2.000000
7/31/2011	3:31:31 AM	PHl3 MFC set to  0.000000
7/31/2011	3:31:31 AM	SiCl4 MFC set to  50.000000
7/31/2011	3:31:31 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	3:31:31 AM	Tube furnace set to 1000
7/31/2011	3:49:31 AM	Helium valve closed
7/31/2011	3:49:31 AM	PH3 valve closed
7/31/2011	3:49:31 AM	Main Vac valve closed
7/31/2011	3:49:31 AM	Bypass valve closed
7/31/2011	3:49:31 AM	H2 valve opened
7/31/2011	3:49:31 AM	BCl3 valve opened
7/31/2011	3:49:31 AM	SiCl4 pre valve opened
7/31/2011	3:49:31 AM	SiCl4 post valve opened
7/31/2011	3:49:31 AM	Bubbler valve opened
7/31/2011	3:49:31 AM	Helium MFC set to  0.000000
7/31/2011	3:49:31 AM	H2 MFC set to  500.000000
7/31/2011	3:49:31 AM	BCl3 MFC set to  12.000000
7/31/2011	3:49:31 AM	PHl3 MFC set to  0.000000
7/31/2011	3:49:31 AM	SiCl4 MFC set to  50.000000
7/31/2011	3:49:31 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	3:49:32 AM	Tube furnace set to 1000
7/31/2011	3:49:42 AM	Helium valve closed
7/31/2011	3:49:42 AM	BCl3 valve closed
7/31/2011	3:49:42 AM	PH3 valve closed
7/31/2011	3:49:42 AM	SiCl4 pre valve closed
7/31/2011	3:49:42 AM	SiCl4 post valve closed
7/31/2011	3:49:42 AM	Main Vac valve closed
7/31/2011	3:49:42 AM	Bypass valve closed
7/31/2011	3:49:42 AM	H2 valve opened
7/31/2011	3:49:42 AM	Bubbler valve opened
7/31/2011	3:49:42 AM	Helium MFC set to  0.000000
7/31/2011	3:49:42 AM	H2 MFC set to  500.000000
7/31/2011	3:49:42 AM	BCl3 MFC set to  0.000000
7/31/2011	3:49:42 AM	PHl3 MFC set to  0.000000
7/31/2011	3:49:42 AM	SiCl4 MFC set to  0.000000
7/31/2011	3:49:42 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	3:49:42 AM	Tube furnace set to 975
7/31/2011	3:50:42 AM	Helium valve closed
7/31/2011	3:50:42 AM	BCl3 valve closed
7/31/2011	3:50:42 AM	PH3 valve closed
7/31/2011	3:50:42 AM	SiCl4 pre valve closed
7/31/2011	3:50:42 AM	SiCl4 post valve closed
7/31/2011	3:50:42 AM	Main Vac valve closed
7/31/2011	3:50:42 AM	Bypass valve closed
7/31/2011	3:50:42 AM	H2 valve opened
7/31/2011	3:50:42 AM	Bubbler valve opened
7/31/2011	3:50:42 AM	Helium MFC set to  0.000000
7/31/2011	3:50:42 AM	H2 MFC set to  500.000000
7/31/2011	3:50:42 AM	BCl3 MFC set to  0.000000
7/31/2011	3:50:42 AM	PHl3 MFC set to  0.000000
7/31/2011	3:50:42 AM	SiCl4 MFC set to  0.000000
7/31/2011	3:50:42 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	3:50:42 AM	Tube furnace set to 950
7/31/2011	3:51:42 AM	Helium valve closed
7/31/2011	3:51:42 AM	BCl3 valve closed
7/31/2011	3:51:42 AM	PH3 valve closed
7/31/2011	3:51:42 AM	SiCl4 pre valve closed
7/31/2011	3:51:42 AM	SiCl4 post valve closed
7/31/2011	3:51:42 AM	Main Vac valve closed
7/31/2011	3:51:42 AM	Bypass valve closed
7/31/2011	3:51:42 AM	H2 valve opened
7/31/2011	3:51:42 AM	Bubbler valve opened
7/31/2011	3:51:42 AM	Helium MFC set to  0.000000
7/31/2011	3:51:42 AM	H2 MFC set to  500.000000
7/31/2011	3:51:42 AM	BCl3 MFC set to  0.000000
7/31/2011	3:51:42 AM	PHl3 MFC set to  0.000000
7/31/2011	3:51:42 AM	SiCl4 MFC set to  0.000000
7/31/2011	3:51:42 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	3:51:42 AM	Tube furnace set to 925
7/31/2011	3:52:42 AM	Helium valve closed
7/31/2011	3:52:42 AM	BCl3 valve closed
7/31/2011	3:52:42 AM	PH3 valve closed
7/31/2011	3:52:42 AM	SiCl4 pre valve closed
7/31/2011	3:52:42 AM	SiCl4 post valve closed
7/31/2011	3:52:42 AM	Main Vac valve closed
7/31/2011	3:52:42 AM	Bypass valve closed
7/31/2011	3:52:42 AM	H2 valve opened
7/31/2011	3:52:42 AM	Bubbler valve opened
7/31/2011	3:52:42 AM	Helium MFC set to  0.000000
7/31/2011	3:52:42 AM	H2 MFC set to  500.000000
7/31/2011	3:52:42 AM	BCl3 MFC set to  0.000000
7/31/2011	3:52:42 AM	PHl3 MFC set to  0.000000
7/31/2011	3:52:42 AM	SiCl4 MFC set to  0.000000
7/31/2011	3:52:42 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	3:52:42 AM	Tube furnace set to 900
7/31/2011	3:53:42 AM	Helium valve closed
7/31/2011	3:53:42 AM	BCl3 valve closed
7/31/2011	3:53:42 AM	PH3 valve closed
7/31/2011	3:53:42 AM	SiCl4 pre valve closed
7/31/2011	3:53:42 AM	SiCl4 post valve closed
7/31/2011	3:53:42 AM	Main Vac valve closed
7/31/2011	3:53:42 AM	Bypass valve closed
7/31/2011	3:53:42 AM	H2 valve opened
7/31/2011	3:53:42 AM	Bubbler valve opened
7/31/2011	3:53:42 AM	Helium MFC set to  0.000000
7/31/2011	3:53:42 AM	H2 MFC set to  500.000000
7/31/2011	3:53:42 AM	BCl3 MFC set to  0.000000
7/31/2011	3:53:42 AM	PHl3 MFC set to  0.000000
7/31/2011	3:53:42 AM	SiCl4 MFC set to  0.000000
7/31/2011	3:53:42 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	3:53:43 AM	Tube furnace set to 850
7/31/2011	3:55:13 AM	H2 valve closed
7/31/2011	3:55:13 AM	BCl3 valve closed
7/31/2011	3:55:13 AM	PH3 valve closed
7/31/2011	3:55:13 AM	SiCl4 pre valve closed
7/31/2011	3:55:13 AM	SiCl4 post valve closed
7/31/2011	3:55:13 AM	Main Vac valve closed
7/31/2011	3:55:13 AM	Bypass valve closed
7/31/2011	3:55:13 AM	Helium valve opened
7/31/2011	3:55:13 AM	Bubbler valve opened
7/31/2011	3:55:13 AM	Helium MFC set to  500.000000
7/31/2011	3:55:13 AM	H2 MFC set to  0.000000
7/31/2011	3:55:13 AM	BCl3 MFC set to  0.000000
7/31/2011	3:55:13 AM	PHl3 MFC set to  0.000000
7/31/2011	3:55:13 AM	SiCl4 MFC set to  0.000000
7/31/2011	3:55:13 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	3:55:13 AM	Tube furnace set to 800
7/31/2011	3:56:43 AM	H2 valve closed
7/31/2011	3:56:43 AM	BCl3 valve closed
7/31/2011	3:56:43 AM	PH3 valve closed
7/31/2011	3:56:43 AM	SiCl4 pre valve closed
7/31/2011	3:56:43 AM	SiCl4 post valve closed
7/31/2011	3:56:43 AM	Main Vac valve closed
7/31/2011	3:56:43 AM	Bypass valve closed
7/31/2011	3:56:43 AM	Helium valve opened
7/31/2011	3:56:43 AM	Bubbler valve opened
7/31/2011	3:56:43 AM	Helium MFC set to  500.000000
7/31/2011	3:56:43 AM	H2 MFC set to  0.000000
7/31/2011	3:56:43 AM	BCl3 MFC set to  0.000000
7/31/2011	3:56:43 AM	PHl3 MFC set to  0.000000
7/31/2011	3:56:43 AM	SiCl4 MFC set to  0.000000
7/31/2011	3:56:43 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	3:56:43 AM	Tube furnace set to 0
7/31/2011	4:16:43 AM	Helium valve closed
7/31/2011	4:16:43 AM	H2 valve closed
7/31/2011	4:16:43 AM	BCl3 valve closed
7/31/2011	4:16:43 AM	PH3 valve closed
7/31/2011	4:16:43 AM	SiCl4 pre valve closed
7/31/2011	4:16:43 AM	SiCl4 post valve closed
7/31/2011	4:16:43 AM	Main Vac valve closed
7/31/2011	4:16:43 AM	Bypass valve closed
7/31/2011	4:16:43 AM	Bubbler valve closed
7/31/2011	4:16:43 AM	Helium MFC set to  0.000000
7/31/2011	4:16:43 AM	H2 MFC set to  0.000000
7/31/2011	4:16:43 AM	BCl3 MFC set to  0.000000
7/31/2011	4:16:43 AM	PHl3 MFC set to  0.000000
7/31/2011	4:16:43 AM	SiCl4 MFC set to  0.000000
7/31/2011	4:16:43 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	4:16:43 AM	Tube furnace set to 0
7/31/2011	4:56:43 AM	Run finished at 4:56 AM
7/31/2011	10:12:32 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/31/2011	10:12:33 AM	Recipe started at 10:12 AM
7/31/2011	10:12:33 AM	Helium valve closed
7/31/2011	10:12:33 AM	H2 valve closed
7/31/2011	10:12:33 AM	BCl3 valve closed
7/31/2011	10:12:33 AM	PH3 valve closed
7/31/2011	10:12:33 AM	SiCl4 pre valve closed
7/31/2011	10:12:33 AM	SiCl4 post valve closed
7/31/2011	10:12:33 AM	Main Vac valve closed
7/31/2011	10:12:33 AM	Bypass valve closed
7/31/2011	10:12:33 AM	Bubbler valve closed
7/31/2011	10:12:33 AM	Helium MFC set to  0.000000
7/31/2011	10:12:33 AM	H2 MFC set to  0.000000
7/31/2011	10:12:33 AM	BCl3 MFC set to  0.000000
7/31/2011	10:12:33 AM	PHl3 MFC set to  0.000000
7/31/2011	10:12:33 AM	SiCl4 MFC set to  0.000000
7/31/2011	10:12:33 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	10:12:33 AM	Tube furnace set to 0
7/31/2011	10:12:36 AM	H2 valve closed
7/31/2011	10:12:36 AM	BCl3 valve closed
7/31/2011	10:12:36 AM	PH3 valve closed
7/31/2011	10:12:36 AM	SiCl4 pre valve closed
7/31/2011	10:12:36 AM	SiCl4 post valve closed
7/31/2011	10:12:36 AM	Main Vac valve closed
7/31/2011	10:12:36 AM	Bypass valve closed
7/31/2011	10:12:36 AM	Bubbler valve closed
7/31/2011	10:12:36 AM	Helium valve opened
7/31/2011	10:12:36 AM	Helium MFC set to  500.000000
7/31/2011	10:12:36 AM	H2 MFC set to  0.000000
7/31/2011	10:12:36 AM	BCl3 MFC set to  0.000000
7/31/2011	10:12:36 AM	PHl3 MFC set to  0.000000
7/31/2011	10:12:36 AM	SiCl4 MFC set to  0.000000
7/31/2011	10:12:36 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	10:12:37 AM	Tube furnace set to 0
7/31/2011	10:12:45 AM	Helium valve closed
7/31/2011	10:12:45 AM	H2 valve closed
7/31/2011	10:12:45 AM	BCl3 valve closed
7/31/2011	10:12:45 AM	PH3 valve closed
7/31/2011	10:12:45 AM	SiCl4 pre valve closed
7/31/2011	10:12:45 AM	SiCl4 post valve closed
7/31/2011	10:12:45 AM	Main Vac valve closed
7/31/2011	10:12:45 AM	Bypass valve closed
7/31/2011	10:12:45 AM	Bubbler valve closed
7/31/2011	10:12:45 AM	Helium MFC set to  0.000000
7/31/2011	10:12:45 AM	H2 MFC set to  0.000000
7/31/2011	10:12:45 AM	BCl3 MFC set to  0.000000
7/31/2011	10:12:45 AM	PHl3 MFC set to  0.000000
7/31/2011	10:12:45 AM	SiCl4 MFC set to  0.000000
7/31/2011	10:12:45 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	10:12:45 AM	Tube furnace set to 0
7/31/2011	10:12:46 AM	Run finished at 10:12 AM
7/31/2011	10:12:46 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/31/2011	10:16:46 AM	Recipe started at 10:16 AM
7/31/2011	10:16:46 AM	Helium valve closed
7/31/2011	10:16:46 AM	H2 valve closed
7/31/2011	10:16:46 AM	BCl3 valve closed
7/31/2011	10:16:46 AM	PH3 valve closed
7/31/2011	10:16:46 AM	SiCl4 pre valve closed
7/31/2011	10:16:46 AM	SiCl4 post valve closed
7/31/2011	10:16:46 AM	Main Vac valve closed
7/31/2011	10:16:46 AM	Bubbler valve closed
7/31/2011	10:16:46 AM	Bypass valve opened
7/31/2011	10:16:46 AM	Helium MFC set to  0.000000
7/31/2011	10:16:46 AM	H2 MFC set to  0.000000
7/31/2011	10:16:46 AM	BCl3 MFC set to  0.000000
7/31/2011	10:16:46 AM	PHl3 MFC set to  0.000000
7/31/2011	10:16:46 AM	SiCl4 MFC set to  0.000000
7/31/2011	10:16:46 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	10:16:46 AM	Tube furnace set to 0
7/31/2011	10:17:50 AM	Helium valve closed
7/31/2011	10:17:50 AM	H2 valve closed
7/31/2011	10:17:50 AM	BCl3 valve closed
7/31/2011	10:17:50 AM	PH3 valve closed
7/31/2011	10:17:50 AM	SiCl4 pre valve closed
7/31/2011	10:17:50 AM	SiCl4 post valve closed
7/31/2011	10:17:50 AM	Main Vac valve closed
7/31/2011	10:17:50 AM	Bubbler valve closed
7/31/2011	10:17:50 AM	Bypass valve opened
7/31/2011	10:17:50 AM	Helium MFC set to  0.000000
7/31/2011	10:17:50 AM	H2 MFC set to  0.000000
7/31/2011	10:17:50 AM	BCl3 MFC set to  0.000000
7/31/2011	10:17:50 AM	PHl3 MFC set to  0.000000
7/31/2011	10:17:50 AM	SiCl4 MFC set to  0.000000
7/31/2011	10:17:50 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	10:17:50 AM	Tube furnace set to 0
7/31/2011	10:18:20 AM	Helium valve closed
7/31/2011	10:18:20 AM	H2 valve closed
7/31/2011	10:18:20 AM	BCl3 valve closed
7/31/2011	10:18:20 AM	PH3 valve closed
7/31/2011	10:18:20 AM	SiCl4 pre valve closed
7/31/2011	10:18:20 AM	SiCl4 post valve closed
7/31/2011	10:18:20 AM	Bypass valve closed
7/31/2011	10:18:20 AM	Bubbler valve closed
7/31/2011	10:18:20 AM	Main Vac valve opened
7/31/2011	10:18:20 AM	Helium MFC set to  0.000000
7/31/2011	10:18:20 AM	H2 MFC set to  0.000000
7/31/2011	10:18:20 AM	BCl3 MFC set to  0.000000
7/31/2011	10:18:20 AM	PHl3 MFC set to  0.000000
7/31/2011	10:18:20 AM	SiCl4 MFC set to  0.000000
7/31/2011	10:18:20 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	10:18:21 AM	Tube furnace set to 0
7/31/2011	10:48:21 AM	H2 valve closed
7/31/2011	10:48:21 AM	BCl3 valve closed
7/31/2011	10:48:21 AM	PH3 valve closed
7/31/2011	10:48:21 AM	SiCl4 pre valve closed
7/31/2011	10:48:21 AM	SiCl4 post valve closed
7/31/2011	10:48:21 AM	Bypass valve closed
7/31/2011	10:48:21 AM	Bubbler valve closed
7/31/2011	10:48:21 AM	Helium valve opened
7/31/2011	10:48:21 AM	Main Vac valve opened
7/31/2011	10:48:21 AM	Helium MFC set to  20.000000
7/31/2011	10:48:21 AM	H2 MFC set to  0.000000
7/31/2011	10:48:21 AM	BCl3 MFC set to  0.000000
7/31/2011	10:48:21 AM	PHl3 MFC set to  0.000000
7/31/2011	10:48:21 AM	SiCl4 MFC set to  0.000000
7/31/2011	10:48:21 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	10:48:21 AM	Tube furnace set to 0
7/31/2011	10:48:51 AM	Helium valve closed
7/31/2011	10:48:51 AM	H2 valve closed
7/31/2011	10:48:51 AM	BCl3 valve closed
7/31/2011	10:48:51 AM	PH3 valve closed
7/31/2011	10:48:51 AM	SiCl4 pre valve closed
7/31/2011	10:48:51 AM	SiCl4 post valve closed
7/31/2011	10:48:51 AM	Bypass valve closed
7/31/2011	10:48:51 AM	Bubbler valve closed
7/31/2011	10:48:51 AM	Main Vac valve opened
7/31/2011	10:48:51 AM	Helium MFC set to  0.000000
7/31/2011	10:48:51 AM	H2 MFC set to  0.000000
7/31/2011	10:48:51 AM	BCl3 MFC set to  0.000000
7/31/2011	10:48:51 AM	PHl3 MFC set to  0.000000
7/31/2011	10:48:51 AM	SiCl4 MFC set to  0.000000
7/31/2011	10:48:51 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	10:48:51 AM	Tube furnace set to 0
7/31/2011	10:49:21 AM	H2 valve closed
7/31/2011	10:49:21 AM	BCl3 valve closed
7/31/2011	10:49:21 AM	PH3 valve closed
7/31/2011	10:49:21 AM	SiCl4 pre valve closed
7/31/2011	10:49:21 AM	SiCl4 post valve closed
7/31/2011	10:49:21 AM	Bypass valve closed
7/31/2011	10:49:21 AM	Bubbler valve closed
7/31/2011	10:49:21 AM	Helium valve opened
7/31/2011	10:49:21 AM	Main Vac valve opened
7/31/2011	10:49:21 AM	Helium MFC set to  20.000000
7/31/2011	10:49:21 AM	H2 MFC set to  0.000000
7/31/2011	10:49:21 AM	BCl3 MFC set to  0.000000
7/31/2011	10:49:21 AM	PHl3 MFC set to  0.000000
7/31/2011	10:49:21 AM	SiCl4 MFC set to  0.000000
7/31/2011	10:49:21 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	10:49:21 AM	Tube furnace set to 0
7/31/2011	10:49:51 AM	Helium valve closed
7/31/2011	10:49:51 AM	H2 valve closed
7/31/2011	10:49:51 AM	BCl3 valve closed
7/31/2011	10:49:51 AM	PH3 valve closed
7/31/2011	10:49:51 AM	SiCl4 pre valve closed
7/31/2011	10:49:51 AM	SiCl4 post valve closed
7/31/2011	10:49:51 AM	Bypass valve closed
7/31/2011	10:49:51 AM	Bubbler valve closed
7/31/2011	10:49:51 AM	Main Vac valve opened
7/31/2011	10:49:51 AM	Helium MFC set to  0.000000
7/31/2011	10:49:51 AM	H2 MFC set to  0.000000
7/31/2011	10:49:51 AM	BCl3 MFC set to  0.000000
7/31/2011	10:49:51 AM	PHl3 MFC set to  0.000000
7/31/2011	10:49:51 AM	SiCl4 MFC set to  0.000000
7/31/2011	10:49:51 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	10:49:51 AM	Tube furnace set to 0
7/31/2011	10:50:21 AM	H2 valve closed
7/31/2011	10:50:21 AM	BCl3 valve closed
7/31/2011	10:50:21 AM	PH3 valve closed
7/31/2011	10:50:21 AM	SiCl4 pre valve closed
7/31/2011	10:50:21 AM	SiCl4 post valve closed
7/31/2011	10:50:21 AM	Bypass valve closed
7/31/2011	10:50:21 AM	Bubbler valve closed
7/31/2011	10:50:21 AM	Helium valve opened
7/31/2011	10:50:21 AM	Main Vac valve opened
7/31/2011	10:50:21 AM	Helium MFC set to  20.000000
7/31/2011	10:50:21 AM	H2 MFC set to  0.000000
7/31/2011	10:50:21 AM	BCl3 MFC set to  0.000000
7/31/2011	10:50:21 AM	PHl3 MFC set to  0.000000
7/31/2011	10:50:21 AM	SiCl4 MFC set to  0.000000
7/31/2011	10:50:21 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	10:50:22 AM	Tube furnace set to 0
7/31/2011	10:50:52 AM	Helium valve closed
7/31/2011	10:50:52 AM	H2 valve closed
7/31/2011	10:50:52 AM	BCl3 valve closed
7/31/2011	10:50:52 AM	PH3 valve closed
7/31/2011	10:50:52 AM	SiCl4 pre valve closed
7/31/2011	10:50:52 AM	SiCl4 post valve closed
7/31/2011	10:50:52 AM	Bypass valve closed
7/31/2011	10:50:52 AM	Bubbler valve closed
7/31/2011	10:50:52 AM	Main Vac valve opened
7/31/2011	10:50:52 AM	Helium MFC set to  0.000000
7/31/2011	10:50:52 AM	H2 MFC set to  0.000000
7/31/2011	10:50:52 AM	BCl3 MFC set to  0.000000
7/31/2011	10:50:52 AM	PHl3 MFC set to  0.000000
7/31/2011	10:50:52 AM	SiCl4 MFC set to  0.000000
7/31/2011	10:50:52 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	10:50:52 AM	Tube furnace set to 0
7/31/2011	10:51:22 AM	H2 valve closed
7/31/2011	10:51:22 AM	BCl3 valve closed
7/31/2011	10:51:22 AM	PH3 valve closed
7/31/2011	10:51:22 AM	SiCl4 pre valve closed
7/31/2011	10:51:22 AM	SiCl4 post valve closed
7/31/2011	10:51:22 AM	Bypass valve closed
7/31/2011	10:51:22 AM	Bubbler valve closed
7/31/2011	10:51:22 AM	Helium valve opened
7/31/2011	10:51:22 AM	Main Vac valve opened
7/31/2011	10:51:22 AM	Helium MFC set to  20.000000
7/31/2011	10:51:22 AM	H2 MFC set to  0.000000
7/31/2011	10:51:22 AM	BCl3 MFC set to  0.000000
7/31/2011	10:51:22 AM	PHl3 MFC set to  0.000000
7/31/2011	10:51:22 AM	SiCl4 MFC set to  0.000000
7/31/2011	10:51:22 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	10:51:22 AM	Tube furnace set to 0
7/31/2011	10:51:52 AM	Helium valve closed
7/31/2011	10:51:52 AM	H2 valve closed
7/31/2011	10:51:52 AM	BCl3 valve closed
7/31/2011	10:51:52 AM	PH3 valve closed
7/31/2011	10:51:52 AM	SiCl4 pre valve closed
7/31/2011	10:51:52 AM	SiCl4 post valve closed
7/31/2011	10:51:52 AM	Bypass valve closed
7/31/2011	10:51:52 AM	Bubbler valve closed
7/31/2011	10:51:52 AM	Main Vac valve opened
7/31/2011	10:51:52 AM	Helium MFC set to  0.000000
7/31/2011	10:51:52 AM	H2 MFC set to  0.000000
7/31/2011	10:51:52 AM	BCl3 MFC set to  0.000000
7/31/2011	10:51:52 AM	PHl3 MFC set to  0.000000
7/31/2011	10:51:52 AM	SiCl4 MFC set to  0.000000
7/31/2011	10:51:52 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	10:51:52 AM	Tube furnace set to 0
7/31/2011	10:52:22 AM	H2 valve closed
7/31/2011	10:52:22 AM	BCl3 valve closed
7/31/2011	10:52:22 AM	PH3 valve closed
7/31/2011	10:52:22 AM	SiCl4 pre valve closed
7/31/2011	10:52:22 AM	SiCl4 post valve closed
7/31/2011	10:52:22 AM	Bypass valve closed
7/31/2011	10:52:22 AM	Bubbler valve closed
7/31/2011	10:52:22 AM	Helium valve opened
7/31/2011	10:52:22 AM	Main Vac valve opened
7/31/2011	10:52:22 AM	Helium MFC set to  20.000000
7/31/2011	10:52:22 AM	H2 MFC set to  0.000000
7/31/2011	10:52:22 AM	BCl3 MFC set to  0.000000
7/31/2011	10:52:22 AM	PHl3 MFC set to  0.000000
7/31/2011	10:52:22 AM	SiCl4 MFC set to  0.000000
7/31/2011	10:52:22 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	10:52:22 AM	Tube furnace set to 0
7/31/2011	10:52:52 AM	Helium valve closed
7/31/2011	10:52:52 AM	H2 valve closed
7/31/2011	10:52:52 AM	BCl3 valve closed
7/31/2011	10:52:52 AM	PH3 valve closed
7/31/2011	10:52:52 AM	SiCl4 pre valve closed
7/31/2011	10:52:52 AM	SiCl4 post valve closed
7/31/2011	10:52:52 AM	Bypass valve closed
7/31/2011	10:52:52 AM	Bubbler valve closed
7/31/2011	10:52:52 AM	Main Vac valve opened
7/31/2011	10:52:52 AM	Helium MFC set to  0.000000
7/31/2011	10:52:52 AM	H2 MFC set to  0.000000
7/31/2011	10:52:52 AM	BCl3 MFC set to  0.000000
7/31/2011	10:52:52 AM	PHl3 MFC set to  0.000000
7/31/2011	10:52:52 AM	SiCl4 MFC set to  0.000000
7/31/2011	10:52:52 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	10:52:53 AM	Tube furnace set to 0
7/31/2011	10:53:23 AM	H2 valve closed
7/31/2011	10:53:23 AM	BCl3 valve closed
7/31/2011	10:53:23 AM	PH3 valve closed
7/31/2011	10:53:23 AM	SiCl4 pre valve closed
7/31/2011	10:53:23 AM	SiCl4 post valve closed
7/31/2011	10:53:23 AM	Bypass valve closed
7/31/2011	10:53:23 AM	Bubbler valve closed
7/31/2011	10:53:23 AM	Helium valve opened
7/31/2011	10:53:23 AM	Main Vac valve opened
7/31/2011	10:53:23 AM	Helium MFC set to  20.000000
7/31/2011	10:53:23 AM	H2 MFC set to  0.000000
7/31/2011	10:53:23 AM	BCl3 MFC set to  0.000000
7/31/2011	10:53:23 AM	PHl3 MFC set to  0.000000
7/31/2011	10:53:23 AM	SiCl4 MFC set to  0.000000
7/31/2011	10:53:23 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	10:53:23 AM	Tube furnace set to 0
7/31/2011	10:53:53 AM	Helium valve closed
7/31/2011	10:53:53 AM	H2 valve closed
7/31/2011	10:53:53 AM	BCl3 valve closed
7/31/2011	10:53:53 AM	PH3 valve closed
7/31/2011	10:53:53 AM	SiCl4 pre valve closed
7/31/2011	10:53:53 AM	SiCl4 post valve closed
7/31/2011	10:53:53 AM	Bypass valve closed
7/31/2011	10:53:53 AM	Bubbler valve closed
7/31/2011	10:53:53 AM	Main Vac valve opened
7/31/2011	10:53:53 AM	Helium MFC set to  0.000000
7/31/2011	10:53:53 AM	H2 MFC set to  0.000000
7/31/2011	10:53:53 AM	BCl3 MFC set to  0.000000
7/31/2011	10:53:53 AM	PHl3 MFC set to  0.000000
7/31/2011	10:53:53 AM	SiCl4 MFC set to  0.000000
7/31/2011	10:53:53 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	10:53:53 AM	Tube furnace set to 0
7/31/2011	10:54:23 AM	H2 valve closed
7/31/2011	10:54:23 AM	BCl3 valve closed
7/31/2011	10:54:23 AM	PH3 valve closed
7/31/2011	10:54:23 AM	SiCl4 pre valve closed
7/31/2011	10:54:23 AM	SiCl4 post valve closed
7/31/2011	10:54:23 AM	Bypass valve closed
7/31/2011	10:54:23 AM	Bubbler valve closed
7/31/2011	10:54:23 AM	Helium valve opened
7/31/2011	10:54:23 AM	Main Vac valve opened
7/31/2011	10:54:23 AM	Helium MFC set to  20.000000
7/31/2011	10:54:23 AM	H2 MFC set to  0.000000
7/31/2011	10:54:23 AM	BCl3 MFC set to  0.000000
7/31/2011	10:54:23 AM	PHl3 MFC set to  0.000000
7/31/2011	10:54:23 AM	SiCl4 MFC set to  0.000000
7/31/2011	10:54:23 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	10:54:23 AM	Tube furnace set to 0
7/31/2011	10:54:53 AM	Helium valve closed
7/31/2011	10:54:53 AM	H2 valve closed
7/31/2011	10:54:53 AM	BCl3 valve closed
7/31/2011	10:54:53 AM	PH3 valve closed
7/31/2011	10:54:53 AM	SiCl4 pre valve closed
7/31/2011	10:54:53 AM	SiCl4 post valve closed
7/31/2011	10:54:53 AM	Bypass valve closed
7/31/2011	10:54:53 AM	Bubbler valve closed
7/31/2011	10:54:53 AM	Main Vac valve opened
7/31/2011	10:54:53 AM	Helium MFC set to  0.000000
7/31/2011	10:54:53 AM	H2 MFC set to  0.000000
7/31/2011	10:54:53 AM	BCl3 MFC set to  0.000000
7/31/2011	10:54:53 AM	PHl3 MFC set to  0.000000
7/31/2011	10:54:53 AM	SiCl4 MFC set to  0.000000
7/31/2011	10:54:53 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	10:54:53 AM	Tube furnace set to 0
7/31/2011	10:55:23 AM	H2 valve closed
7/31/2011	10:55:23 AM	BCl3 valve closed
7/31/2011	10:55:23 AM	PH3 valve closed
7/31/2011	10:55:23 AM	SiCl4 pre valve closed
7/31/2011	10:55:23 AM	SiCl4 post valve closed
7/31/2011	10:55:23 AM	Bypass valve closed
7/31/2011	10:55:23 AM	Bubbler valve closed
7/31/2011	10:55:23 AM	Helium valve opened
7/31/2011	10:55:23 AM	Main Vac valve opened
7/31/2011	10:55:23 AM	Helium MFC set to  20.000000
7/31/2011	10:55:23 AM	H2 MFC set to  0.000000
7/31/2011	10:55:23 AM	BCl3 MFC set to  0.000000
7/31/2011	10:55:23 AM	PHl3 MFC set to  0.000000
7/31/2011	10:55:23 AM	SiCl4 MFC set to  0.000000
7/31/2011	10:55:23 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	10:55:23 AM	Tube furnace set to 0
7/31/2011	10:55:54 AM	Helium valve closed
7/31/2011	10:55:54 AM	H2 valve closed
7/31/2011	10:55:54 AM	BCl3 valve closed
7/31/2011	10:55:54 AM	PH3 valve closed
7/31/2011	10:55:54 AM	SiCl4 pre valve closed
7/31/2011	10:55:54 AM	SiCl4 post valve closed
7/31/2011	10:55:54 AM	Bypass valve closed
7/31/2011	10:55:54 AM	Bubbler valve closed
7/31/2011	10:55:54 AM	Main Vac valve opened
7/31/2011	10:55:54 AM	Helium MFC set to  0.000000
7/31/2011	10:55:54 AM	H2 MFC set to  0.000000
7/31/2011	10:55:54 AM	BCl3 MFC set to  0.000000
7/31/2011	10:55:54 AM	PHl3 MFC set to  0.000000
7/31/2011	10:55:54 AM	SiCl4 MFC set to  0.000000
7/31/2011	10:55:54 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	10:55:54 AM	Tube furnace set to 0
7/31/2011	10:56:24 AM	H2 valve closed
7/31/2011	10:56:24 AM	BCl3 valve closed
7/31/2011	10:56:24 AM	PH3 valve closed
7/31/2011	10:56:24 AM	SiCl4 pre valve closed
7/31/2011	10:56:24 AM	SiCl4 post valve closed
7/31/2011	10:56:24 AM	Bypass valve closed
7/31/2011	10:56:24 AM	Bubbler valve closed
7/31/2011	10:56:24 AM	Helium valve opened
7/31/2011	10:56:24 AM	Main Vac valve opened
7/31/2011	10:56:24 AM	Helium MFC set to  20.000000
7/31/2011	10:56:24 AM	H2 MFC set to  0.000000
7/31/2011	10:56:24 AM	BCl3 MFC set to  0.000000
7/31/2011	10:56:24 AM	PHl3 MFC set to  0.000000
7/31/2011	10:56:24 AM	SiCl4 MFC set to  0.000000
7/31/2011	10:56:24 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	10:56:24 AM	Tube furnace set to 0
7/31/2011	10:56:54 AM	Helium valve closed
7/31/2011	10:56:54 AM	H2 valve closed
7/31/2011	10:56:54 AM	BCl3 valve closed
7/31/2011	10:56:54 AM	PH3 valve closed
7/31/2011	10:56:54 AM	SiCl4 pre valve closed
7/31/2011	10:56:54 AM	SiCl4 post valve closed
7/31/2011	10:56:54 AM	Bypass valve closed
7/31/2011	10:56:54 AM	Bubbler valve closed
7/31/2011	10:56:54 AM	Main Vac valve opened
7/31/2011	10:56:54 AM	Helium MFC set to  0.000000
7/31/2011	10:56:54 AM	H2 MFC set to  0.000000
7/31/2011	10:56:54 AM	BCl3 MFC set to  0.000000
7/31/2011	10:56:54 AM	PHl3 MFC set to  0.000000
7/31/2011	10:56:54 AM	SiCl4 MFC set to  0.000000
7/31/2011	10:56:54 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	10:56:54 AM	Tube furnace set to 0
7/31/2011	10:57:24 AM	H2 valve closed
7/31/2011	10:57:24 AM	BCl3 valve closed
7/31/2011	10:57:24 AM	PH3 valve closed
7/31/2011	10:57:24 AM	SiCl4 pre valve closed
7/31/2011	10:57:24 AM	SiCl4 post valve closed
7/31/2011	10:57:24 AM	Bypass valve closed
7/31/2011	10:57:24 AM	Bubbler valve closed
7/31/2011	10:57:24 AM	Helium valve opened
7/31/2011	10:57:24 AM	Main Vac valve opened
7/31/2011	10:57:24 AM	Helium MFC set to  20.000000
7/31/2011	10:57:24 AM	H2 MFC set to  0.000000
7/31/2011	10:57:24 AM	BCl3 MFC set to  0.000000
7/31/2011	10:57:24 AM	PHl3 MFC set to  0.000000
7/31/2011	10:57:24 AM	SiCl4 MFC set to  0.000000
7/31/2011	10:57:24 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	10:57:24 AM	Tube furnace set to 0
7/31/2011	10:57:54 AM	Helium valve closed
7/31/2011	10:57:54 AM	H2 valve closed
7/31/2011	10:57:54 AM	BCl3 valve closed
7/31/2011	10:57:54 AM	PH3 valve closed
7/31/2011	10:57:54 AM	SiCl4 pre valve closed
7/31/2011	10:57:54 AM	SiCl4 post valve closed
7/31/2011	10:57:54 AM	Bypass valve closed
7/31/2011	10:57:54 AM	Bubbler valve closed
7/31/2011	10:57:54 AM	Main Vac valve opened
7/31/2011	10:57:54 AM	Helium MFC set to  0.000000
7/31/2011	10:57:54 AM	H2 MFC set to  0.000000
7/31/2011	10:57:54 AM	BCl3 MFC set to  0.000000
7/31/2011	10:57:54 AM	PHl3 MFC set to  0.000000
7/31/2011	10:57:54 AM	SiCl4 MFC set to  0.000000
7/31/2011	10:57:54 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	10:57:54 AM	Tube furnace set to 0
7/31/2011	10:57:55 AM	Run finished at 10:57 AM
7/31/2011	11:51:48 AM	Main Vac valve closed
7/31/2011	11:52:01 AM	Main Vac valve opened
7/31/2011	11:59:50 AM	Recipe started at 11:59 AM
7/31/2011	11:59:50 AM	Helium valve closed
7/31/2011	11:59:50 AM	H2 valve closed
7/31/2011	11:59:50 AM	BCl3 valve closed
7/31/2011	11:59:50 AM	SiCl4 pre valve closed
7/31/2011	11:59:50 AM	SiCl4 post valve closed
7/31/2011	11:59:50 AM	Main Vac valve closed
7/31/2011	11:59:50 AM	Bypass valve closed
7/31/2011	11:59:50 AM	Bubbler valve closed
7/31/2011	11:59:50 AM	PH3 valve opened
7/31/2011	11:59:50 AM	Helium MFC set to  0.000000
7/31/2011	11:59:50 AM	H2 MFC set to  0.000000
7/31/2011	11:59:50 AM	BCl3 MFC set to  0.000000
7/31/2011	11:59:50 AM	PHl3 MFC set to  0.000000
7/31/2011	11:59:50 AM	SiCl4 MFC set to  0.000000
7/31/2011	11:59:50 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	11:59:50 AM	Tube furnace set to 0
7/31/2011	11:59:53 AM	Helium valve closed
7/31/2011	11:59:53 AM	BCl3 valve closed
7/31/2011	11:59:53 AM	PH3 valve closed
7/31/2011	11:59:53 AM	SiCl4 pre valve closed
7/31/2011	11:59:53 AM	SiCl4 post valve closed
7/31/2011	11:59:53 AM	Main Vac valve closed
7/31/2011	11:59:53 AM	Bypass valve closed
7/31/2011	11:59:53 AM	Bubbler valve closed
7/31/2011	11:59:53 AM	H2 valve opened
7/31/2011	11:59:53 AM	Helium MFC set to  0.000000
7/31/2011	11:59:53 AM	H2 MFC set to  500.000000
7/31/2011	11:59:53 AM	BCl3 MFC set to  0.000000
7/31/2011	11:59:53 AM	PHl3 MFC set to  0.000000
7/31/2011	11:59:53 AM	SiCl4 MFC set to  0.000000
7/31/2011	11:59:53 AM	Bypass solenoid MFC set to  0.000000
7/31/2011	11:59:53 AM	Tube furnace set to 0
7/31/2011	12:00:22 PM	Run aborted at 12:00 PM
7/31/2011	12:00:22 PM	Helium valve closed
7/31/2011	12:00:22 PM	H2 valve closed
7/31/2011	12:00:22 PM	BCl3 valve closed
7/31/2011	12:00:22 PM	PH3 valve closed
7/31/2011	12:00:22 PM	SiCl4 pre valve closed
7/31/2011	12:00:22 PM	SiCl4 post valve closed
7/31/2011	12:00:22 PM	Bypass valve closed
7/31/2011	12:00:22 PM	Main Vac valve closed
7/31/2011	12:00:22 PM	Bubbler valve closed
7/31/2011	12:00:22 PM	Helium MFC set to  0.000000
7/31/2011	12:00:22 PM	H2 MFC set to  0.000000
7/31/2011	12:00:22 PM	BCl3 MFC set to  0.000000
7/31/2011	12:00:22 PM	PHl3 MFC set to  0.000000
7/31/2011	12:00:22 PM	SiCl4 MFC set to  0.000000
7/31/2011	12:00:22 PM	Tube furnace set to 0
7/31/2011	12:01:11 PM	Recipe started at 12:01 PM
7/31/2011	12:01:11 PM	Helium valve closed
7/31/2011	12:01:11 PM	H2 valve closed
7/31/2011	12:01:11 PM	BCl3 valve closed
7/31/2011	12:01:11 PM	PH3 valve closed
7/31/2011	12:01:11 PM	SiCl4 pre valve closed
7/31/2011	12:01:11 PM	SiCl4 post valve closed
7/31/2011	12:01:11 PM	Main Vac valve closed
7/31/2011	12:01:11 PM	Bypass valve closed
7/31/2011	12:01:11 PM	Bubbler valve closed
7/31/2011	12:01:11 PM	Helium MFC set to  0.000000
7/31/2011	12:01:11 PM	H2 MFC set to  0.000000
7/31/2011	12:01:11 PM	BCl3 MFC set to  0.000000
7/31/2011	12:01:11 PM	PHl3 MFC set to  0.000000
7/31/2011	12:01:11 PM	SiCl4 MFC set to  0.000000
7/31/2011	12:01:11 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	12:01:11 PM	Tube furnace set to 0
7/31/2011	12:01:14 PM	Helium valve closed
7/31/2011	12:01:14 PM	BCl3 valve closed
7/31/2011	12:01:14 PM	PH3 valve closed
7/31/2011	12:01:14 PM	SiCl4 pre valve closed
7/31/2011	12:01:14 PM	SiCl4 post valve closed
7/31/2011	12:01:14 PM	Main Vac valve closed
7/31/2011	12:01:14 PM	Bypass valve closed
7/31/2011	12:01:14 PM	Bubbler valve closed
7/31/2011	12:01:14 PM	H2 valve opened
7/31/2011	12:01:14 PM	Helium MFC set to  0.000000
7/31/2011	12:01:14 PM	H2 MFC set to  500.000000
7/31/2011	12:01:14 PM	BCl3 MFC set to  0.000000
7/31/2011	12:01:14 PM	PHl3 MFC set to  0.000000
7/31/2011	12:01:14 PM	SiCl4 MFC set to  0.000000
7/31/2011	12:01:14 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	12:01:14 PM	Tube furnace set to 0
7/31/2011	12:01:52 PM	Helium valve closed
7/31/2011	12:01:52 PM	BCl3 valve closed
7/31/2011	12:01:52 PM	PH3 valve closed
7/31/2011	12:01:52 PM	SiCl4 pre valve closed
7/31/2011	12:01:52 PM	SiCl4 post valve closed
7/31/2011	12:01:52 PM	Main Vac valve closed
7/31/2011	12:01:52 PM	Bypass valve closed
7/31/2011	12:01:52 PM	H2 valve opened
7/31/2011	12:01:52 PM	Bubbler valve opened
7/31/2011	12:01:52 PM	Helium MFC set to  0.000000
7/31/2011	12:01:52 PM	H2 MFC set to  500.000000
7/31/2011	12:01:52 PM	BCl3 MFC set to  0.000000
7/31/2011	12:01:52 PM	PHl3 MFC set to  0.000000
7/31/2011	12:01:52 PM	SiCl4 MFC set to  0.000000
7/31/2011	12:01:52 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	12:01:52 PM	Tube furnace set to 0
7/31/2011	12:01:53 PM	Helium valve closed
7/31/2011	12:01:53 PM	BCl3 valve closed
7/31/2011	12:01:53 PM	PH3 valve closed
7/31/2011	12:01:53 PM	SiCl4 pre valve closed
7/31/2011	12:01:53 PM	SiCl4 post valve closed
7/31/2011	12:01:53 PM	Main Vac valve closed
7/31/2011	12:01:53 PM	Bypass valve closed
7/31/2011	12:01:53 PM	H2 valve opened
7/31/2011	12:01:53 PM	Bubbler valve opened
7/31/2011	12:01:53 PM	Helium MFC set to  0.000000
7/31/2011	12:01:53 PM	H2 MFC set to  500.000000
7/31/2011	12:01:53 PM	BCl3 MFC set to  0.000000
7/31/2011	12:01:53 PM	PHl3 MFC set to  0.000000
7/31/2011	12:01:53 PM	SiCl4 MFC set to  0.000000
7/31/2011	12:01:53 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	12:01:53 PM	Tube furnace set to 1000
7/31/2011	12:21:53 PM	Helium valve closed
7/31/2011	12:21:53 PM	PH3 valve closed
7/31/2011	12:21:53 PM	Main Vac valve closed
7/31/2011	12:21:53 PM	Bypass valve closed
7/31/2011	12:21:53 PM	H2 valve opened
7/31/2011	12:21:53 PM	BCl3 valve opened
7/31/2011	12:21:53 PM	SiCl4 pre valve opened
7/31/2011	12:21:53 PM	SiCl4 post valve opened
7/31/2011	12:21:53 PM	Bubbler valve opened
7/31/2011	12:21:53 PM	Helium MFC set to  0.000000
7/31/2011	12:21:53 PM	H2 MFC set to  500.000000
7/31/2011	12:21:53 PM	BCl3 MFC set to  2.000000
7/31/2011	12:21:53 PM	PHl3 MFC set to  0.000000
7/31/2011	12:21:53 PM	SiCl4 MFC set to  50.000000
7/31/2011	12:21:53 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	12:21:54 PM	Tube furnace set to 1000
7/31/2011	12:37:53 PM	Helium valve closed
7/31/2011	12:37:54 PM	BCl3 valve closed
7/31/2011	12:37:54 PM	PH3 valve closed
7/31/2011	12:37:54 PM	SiCl4 pre valve closed
7/31/2011	12:37:54 PM	SiCl4 post valve closed
7/31/2011	12:37:54 PM	Main Vac valve closed
7/31/2011	12:37:54 PM	Bypass valve closed
7/31/2011	12:37:54 PM	H2 valve opened
7/31/2011	12:37:54 PM	Bubbler valve opened
7/31/2011	12:37:54 PM	Helium MFC set to  0.000000
7/31/2011	12:37:54 PM	H2 MFC set to  500.000000
7/31/2011	12:37:54 PM	BCl3 MFC set to  0.000000
7/31/2011	12:37:54 PM	PHl3 MFC set to  0.000000
7/31/2011	12:37:54 PM	SiCl4 MFC set to  0.000000
7/31/2011	12:37:54 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	12:37:54 PM	Tube furnace set to 975
7/31/2011	12:38:54 PM	Helium valve closed
7/31/2011	12:38:54 PM	BCl3 valve closed
7/31/2011	12:38:54 PM	PH3 valve closed
7/31/2011	12:38:54 PM	SiCl4 pre valve closed
7/31/2011	12:38:54 PM	SiCl4 post valve closed
7/31/2011	12:38:54 PM	Main Vac valve closed
7/31/2011	12:38:54 PM	Bypass valve closed
7/31/2011	12:38:54 PM	H2 valve opened
7/31/2011	12:38:54 PM	Bubbler valve opened
7/31/2011	12:38:54 PM	Helium MFC set to  0.000000
7/31/2011	12:38:54 PM	H2 MFC set to  500.000000
7/31/2011	12:38:54 PM	BCl3 MFC set to  0.000000
7/31/2011	12:38:54 PM	PHl3 MFC set to  0.000000
7/31/2011	12:38:54 PM	SiCl4 MFC set to  0.000000
7/31/2011	12:38:54 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	12:38:54 PM	Tube furnace set to 950
7/31/2011	12:39:54 PM	Helium valve closed
7/31/2011	12:39:54 PM	BCl3 valve closed
7/31/2011	12:39:54 PM	PH3 valve closed
7/31/2011	12:39:54 PM	SiCl4 pre valve closed
7/31/2011	12:39:54 PM	SiCl4 post valve closed
7/31/2011	12:39:54 PM	Main Vac valve closed
7/31/2011	12:39:54 PM	Bypass valve closed
7/31/2011	12:39:54 PM	H2 valve opened
7/31/2011	12:39:54 PM	Bubbler valve opened
7/31/2011	12:39:54 PM	Helium MFC set to  0.000000
7/31/2011	12:39:54 PM	H2 MFC set to  500.000000
7/31/2011	12:39:54 PM	BCl3 MFC set to  0.000000
7/31/2011	12:39:54 PM	PHl3 MFC set to  0.000000
7/31/2011	12:39:54 PM	SiCl4 MFC set to  0.000000
7/31/2011	12:39:54 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	12:39:54 PM	Tube furnace set to 925
7/31/2011	12:40:54 PM	Helium valve closed
7/31/2011	12:40:54 PM	BCl3 valve closed
7/31/2011	12:40:54 PM	PH3 valve closed
7/31/2011	12:40:54 PM	SiCl4 pre valve closed
7/31/2011	12:40:54 PM	SiCl4 post valve closed
7/31/2011	12:40:54 PM	Main Vac valve closed
7/31/2011	12:40:54 PM	Bypass valve closed
7/31/2011	12:40:54 PM	H2 valve opened
7/31/2011	12:40:54 PM	Bubbler valve opened
7/31/2011	12:40:54 PM	Helium MFC set to  0.000000
7/31/2011	12:40:54 PM	H2 MFC set to  500.000000
7/31/2011	12:40:54 PM	BCl3 MFC set to  0.000000
7/31/2011	12:40:54 PM	PHl3 MFC set to  0.000000
7/31/2011	12:40:54 PM	SiCl4 MFC set to  0.000000
7/31/2011	12:40:54 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	12:40:54 PM	Tube furnace set to 900
7/31/2011	12:41:54 PM	Helium valve closed
7/31/2011	12:41:54 PM	BCl3 valve closed
7/31/2011	12:41:54 PM	PH3 valve closed
7/31/2011	12:41:54 PM	SiCl4 pre valve closed
7/31/2011	12:41:54 PM	SiCl4 post valve closed
7/31/2011	12:41:54 PM	Main Vac valve closed
7/31/2011	12:41:54 PM	Bypass valve closed
7/31/2011	12:41:54 PM	H2 valve opened
7/31/2011	12:41:54 PM	Bubbler valve opened
7/31/2011	12:41:54 PM	Helium MFC set to  0.000000
7/31/2011	12:41:54 PM	H2 MFC set to  500.000000
7/31/2011	12:41:54 PM	BCl3 MFC set to  0.000000
7/31/2011	12:41:54 PM	PHl3 MFC set to  0.000000
7/31/2011	12:41:54 PM	SiCl4 MFC set to  0.000000
7/31/2011	12:41:54 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	12:41:54 PM	Tube furnace set to 850
7/31/2011	12:43:24 PM	Helium valve closed
7/31/2011	12:43:24 PM	BCl3 valve closed
7/31/2011	12:43:24 PM	PH3 valve closed
7/31/2011	12:43:24 PM	SiCl4 pre valve closed
7/31/2011	12:43:24 PM	SiCl4 post valve closed
7/31/2011	12:43:24 PM	Main Vac valve closed
7/31/2011	12:43:24 PM	Bypass valve closed
7/31/2011	12:43:24 PM	H2 valve opened
7/31/2011	12:43:25 PM	Bubbler valve opened
7/31/2011	12:43:25 PM	Helium MFC set to  0.000000
7/31/2011	12:43:25 PM	H2 MFC set to  500.000000
7/31/2011	12:43:25 PM	BCl3 MFC set to  0.000000
7/31/2011	12:43:25 PM	PHl3 MFC set to  0.000000
7/31/2011	12:43:25 PM	SiCl4 MFC set to  0.000000
7/31/2011	12:43:25 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	12:43:25 PM	Tube furnace set to 800
7/31/2011	12:44:55 PM	H2 valve closed
7/31/2011	12:44:55 PM	BCl3 valve closed
7/31/2011	12:44:55 PM	PH3 valve closed
7/31/2011	12:44:55 PM	SiCl4 pre valve closed
7/31/2011	12:44:55 PM	SiCl4 post valve closed
7/31/2011	12:44:55 PM	Main Vac valve closed
7/31/2011	12:44:55 PM	Bypass valve closed
7/31/2011	12:44:55 PM	Helium valve opened
7/31/2011	12:44:55 PM	Bubbler valve opened
7/31/2011	12:44:55 PM	Helium MFC set to  500.000000
7/31/2011	12:44:55 PM	H2 MFC set to  0.000000
7/31/2011	12:44:55 PM	BCl3 MFC set to  0.000000
7/31/2011	12:44:55 PM	PHl3 MFC set to  0.000000
7/31/2011	12:44:55 PM	SiCl4 MFC set to  0.000000
7/31/2011	12:44:55 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	12:44:55 PM	Tube furnace set to 0
7/31/2011	1:04:55 PM	Helium valve closed
7/31/2011	1:04:55 PM	H2 valve closed
7/31/2011	1:04:55 PM	BCl3 valve closed
7/31/2011	1:04:55 PM	PH3 valve closed
7/31/2011	1:04:55 PM	SiCl4 pre valve closed
7/31/2011	1:04:55 PM	SiCl4 post valve closed
7/31/2011	1:04:55 PM	Main Vac valve closed
7/31/2011	1:04:55 PM	Bypass valve closed
7/31/2011	1:04:55 PM	Bubbler valve closed
7/31/2011	1:04:55 PM	Helium MFC set to  0.000000
7/31/2011	1:04:55 PM	H2 MFC set to  0.000000
7/31/2011	1:04:55 PM	BCl3 MFC set to  0.000000
7/31/2011	1:04:55 PM	PHl3 MFC set to  0.000000
7/31/2011	1:04:55 PM	SiCl4 MFC set to  0.000000
7/31/2011	1:04:55 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	1:04:55 PM	Tube furnace set to 0
7/31/2011	1:39:06 PM	Run aborted at 1:39 PM
7/31/2011	1:39:06 PM	Helium valve closed
7/31/2011	1:39:06 PM	H2 valve closed
7/31/2011	1:39:06 PM	BCl3 valve closed
7/31/2011	1:39:06 PM	PH3 valve closed
7/31/2011	1:39:06 PM	SiCl4 pre valve closed
7/31/2011	1:39:06 PM	SiCl4 post valve closed
7/31/2011	1:39:06 PM	Bypass valve closed
7/31/2011	1:39:06 PM	Main Vac valve closed
7/31/2011	1:39:06 PM	Bubbler valve closed
7/31/2011	1:39:06 PM	Helium MFC set to  0.000000
7/31/2011	1:39:06 PM	H2 MFC set to  0.000000
7/31/2011	1:39:06 PM	BCl3 MFC set to  0.000000
7/31/2011	1:39:06 PM	PHl3 MFC set to  0.000000
7/31/2011	1:39:06 PM	SiCl4 MFC set to  0.000000
7/31/2011	1:39:06 PM	Tube furnace set to 0
7/31/2011	1:39:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/31/2011	1:39:15 PM	Recipe started at 1:39 PM
7/31/2011	1:39:15 PM	Helium valve closed
7/31/2011	1:39:15 PM	H2 valve closed
7/31/2011	1:39:15 PM	BCl3 valve closed
7/31/2011	1:39:15 PM	PH3 valve closed
7/31/2011	1:39:15 PM	SiCl4 pre valve closed
7/31/2011	1:39:15 PM	SiCl4 post valve closed
7/31/2011	1:39:15 PM	Main Vac valve closed
7/31/2011	1:39:15 PM	Bypass valve closed
7/31/2011	1:39:15 PM	Bubbler valve closed
7/31/2011	1:39:15 PM	Helium MFC set to  0.000000
7/31/2011	1:39:15 PM	H2 MFC set to  0.000000
7/31/2011	1:39:15 PM	BCl3 MFC set to  0.000000
7/31/2011	1:39:15 PM	PHl3 MFC set to  0.000000
7/31/2011	1:39:15 PM	SiCl4 MFC set to  0.000000
7/31/2011	1:39:15 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	1:39:16 PM	Tube furnace set to 0
7/31/2011	1:39:19 PM	H2 valve closed
7/31/2011	1:39:19 PM	BCl3 valve closed
7/31/2011	1:39:19 PM	PH3 valve closed
7/31/2011	1:39:19 PM	SiCl4 pre valve closed
7/31/2011	1:39:19 PM	SiCl4 post valve closed
7/31/2011	1:39:19 PM	Main Vac valve closed
7/31/2011	1:39:19 PM	Bypass valve closed
7/31/2011	1:39:19 PM	Bubbler valve closed
7/31/2011	1:39:19 PM	Helium valve opened
7/31/2011	1:39:19 PM	Helium MFC set to  500.000000
7/31/2011	1:39:19 PM	H2 MFC set to  0.000000
7/31/2011	1:39:19 PM	BCl3 MFC set to  0.000000
7/31/2011	1:39:19 PM	PHl3 MFC set to  0.000000
7/31/2011	1:39:19 PM	SiCl4 MFC set to  0.000000
7/31/2011	1:39:19 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	1:39:19 PM	Tube furnace set to 0
7/31/2011	1:39:24 PM	Helium valve closed
7/31/2011	1:39:24 PM	H2 valve closed
7/31/2011	1:39:24 PM	BCl3 valve closed
7/31/2011	1:39:24 PM	PH3 valve closed
7/31/2011	1:39:24 PM	SiCl4 pre valve closed
7/31/2011	1:39:24 PM	SiCl4 post valve closed
7/31/2011	1:39:24 PM	Main Vac valve closed
7/31/2011	1:39:24 PM	Bypass valve closed
7/31/2011	1:39:24 PM	Bubbler valve closed
7/31/2011	1:39:24 PM	Helium MFC set to  0.000000
7/31/2011	1:39:24 PM	H2 MFC set to  0.000000
7/31/2011	1:39:24 PM	BCl3 MFC set to  0.000000
7/31/2011	1:39:24 PM	PHl3 MFC set to  0.000000
7/31/2011	1:39:24 PM	SiCl4 MFC set to  0.000000
7/31/2011	1:39:24 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	1:39:24 PM	Tube furnace set to 0
7/31/2011	1:39:25 PM	Run finished at 1:39 PM
7/31/2011	1:39:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/31/2011	1:46:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/31/2011	1:46:38 PM	Recipe started at 1:46 PM
7/31/2011	1:46:38 PM	Helium valve closed
7/31/2011	1:46:38 PM	H2 valve closed
7/31/2011	1:46:38 PM	BCl3 valve closed
7/31/2011	1:46:38 PM	PH3 valve closed
7/31/2011	1:46:38 PM	SiCl4 pre valve closed
7/31/2011	1:46:38 PM	SiCl4 post valve closed
7/31/2011	1:46:38 PM	Main Vac valve closed
7/31/2011	1:46:38 PM	Bubbler valve closed
7/31/2011	1:46:38 PM	Bypass valve opened
7/31/2011	1:46:38 PM	Helium MFC set to  0.000000
7/31/2011	1:46:38 PM	H2 MFC set to  0.000000
7/31/2011	1:46:38 PM	BCl3 MFC set to  0.000000
7/31/2011	1:46:38 PM	PHl3 MFC set to  0.000000
7/31/2011	1:46:38 PM	SiCl4 MFC set to  0.000000
7/31/2011	1:46:38 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	1:46:39 PM	Tube furnace set to 0
7/31/2011	1:47:50 PM	Helium valve closed
7/31/2011	1:47:50 PM	H2 valve closed
7/31/2011	1:47:50 PM	BCl3 valve closed
7/31/2011	1:47:50 PM	PH3 valve closed
7/31/2011	1:47:50 PM	SiCl4 pre valve closed
7/31/2011	1:47:50 PM	SiCl4 post valve closed
7/31/2011	1:47:50 PM	Main Vac valve closed
7/31/2011	1:47:50 PM	Bubbler valve closed
7/31/2011	1:47:50 PM	Bypass valve opened
7/31/2011	1:47:50 PM	Helium MFC set to  0.000000
7/31/2011	1:47:50 PM	H2 MFC set to  0.000000
7/31/2011	1:47:50 PM	BCl3 MFC set to  0.000000
7/31/2011	1:47:50 PM	PHl3 MFC set to  0.000000
7/31/2011	1:47:50 PM	SiCl4 MFC set to  0.000000
7/31/2011	1:47:50 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	1:47:50 PM	Tube furnace set to 0
7/31/2011	1:48:50 PM	Helium valve closed
7/31/2011	1:48:50 PM	H2 valve closed
7/31/2011	1:48:50 PM	BCl3 valve closed
7/31/2011	1:48:50 PM	PH3 valve closed
7/31/2011	1:48:50 PM	SiCl4 pre valve closed
7/31/2011	1:48:50 PM	SiCl4 post valve closed
7/31/2011	1:48:50 PM	Bypass valve closed
7/31/2011	1:48:50 PM	Bubbler valve closed
7/31/2011	1:48:50 PM	Main Vac valve opened
7/31/2011	1:48:50 PM	Helium MFC set to  0.000000
7/31/2011	1:48:50 PM	H2 MFC set to  0.000000
7/31/2011	1:48:50 PM	BCl3 MFC set to  0.000000
7/31/2011	1:48:50 PM	PHl3 MFC set to  0.000000
7/31/2011	1:48:50 PM	SiCl4 MFC set to  0.000000
7/31/2011	1:48:50 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	1:48:50 PM	Tube furnace set to 0
7/31/2011	1:48:51 PM	Run finished at 1:48 PM
7/31/2011	1:48:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/31/2011	1:51:03 PM	Recipe started at 1:50 PM
7/31/2011	1:51:03 PM	Helium valve closed
7/31/2011	1:51:03 PM	H2 valve closed
7/31/2011	1:51:03 PM	BCl3 valve closed
7/31/2011	1:51:03 PM	PH3 valve closed
7/31/2011	1:51:03 PM	SiCl4 pre valve closed
7/31/2011	1:51:03 PM	SiCl4 post valve closed
7/31/2011	1:51:03 PM	Bypass valve closed
7/31/2011	1:51:03 PM	Bubbler valve closed
7/31/2011	1:51:03 PM	Main Vac valve opened
7/31/2011	1:51:03 PM	Helium MFC set to  0.000000
7/31/2011	1:51:03 PM	H2 MFC set to  0.000000
7/31/2011	1:51:03 PM	BCl3 MFC set to  0.000000
7/31/2011	1:51:03 PM	PHl3 MFC set to  0.000000
7/31/2011	1:51:03 PM	SiCl4 MFC set to  0.000000
7/31/2011	1:51:03 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	1:51:04 PM	Tube furnace set to 0
7/31/2011	2:21:03 PM	H2 valve closed
7/31/2011	2:21:03 PM	BCl3 valve closed
7/31/2011	2:21:03 PM	PH3 valve closed
7/31/2011	2:21:03 PM	SiCl4 pre valve closed
7/31/2011	2:21:03 PM	SiCl4 post valve closed
7/31/2011	2:21:03 PM	Bypass valve closed
7/31/2011	2:21:03 PM	Bubbler valve closed
7/31/2011	2:21:03 PM	Helium valve opened
7/31/2011	2:21:03 PM	Main Vac valve opened
7/31/2011	2:21:03 PM	Helium MFC set to  20.000000
7/31/2011	2:21:03 PM	H2 MFC set to  0.000000
7/31/2011	2:21:03 PM	BCl3 MFC set to  0.000000
7/31/2011	2:21:03 PM	PHl3 MFC set to  0.000000
7/31/2011	2:21:03 PM	SiCl4 MFC set to  0.000000
7/31/2011	2:21:03 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	2:21:04 PM	Tube furnace set to 0
7/31/2011	2:21:34 PM	Helium valve closed
7/31/2011	2:21:34 PM	H2 valve closed
7/31/2011	2:21:34 PM	BCl3 valve closed
7/31/2011	2:21:34 PM	PH3 valve closed
7/31/2011	2:21:34 PM	SiCl4 pre valve closed
7/31/2011	2:21:34 PM	SiCl4 post valve closed
7/31/2011	2:21:34 PM	Bypass valve closed
7/31/2011	2:21:34 PM	Bubbler valve closed
7/31/2011	2:21:34 PM	Main Vac valve opened
7/31/2011	2:21:34 PM	Helium MFC set to  0.000000
7/31/2011	2:21:34 PM	H2 MFC set to  0.000000
7/31/2011	2:21:34 PM	BCl3 MFC set to  0.000000
7/31/2011	2:21:34 PM	PHl3 MFC set to  0.000000
7/31/2011	2:21:34 PM	SiCl4 MFC set to  0.000000
7/31/2011	2:21:34 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	2:21:34 PM	Tube furnace set to 0
7/31/2011	2:22:04 PM	H2 valve closed
7/31/2011	2:22:04 PM	BCl3 valve closed
7/31/2011	2:22:04 PM	PH3 valve closed
7/31/2011	2:22:04 PM	SiCl4 pre valve closed
7/31/2011	2:22:04 PM	SiCl4 post valve closed
7/31/2011	2:22:04 PM	Bypass valve closed
7/31/2011	2:22:04 PM	Bubbler valve closed
7/31/2011	2:22:04 PM	Helium valve opened
7/31/2011	2:22:04 PM	Main Vac valve opened
7/31/2011	2:22:04 PM	Helium MFC set to  20.000000
7/31/2011	2:22:04 PM	H2 MFC set to  0.000000
7/31/2011	2:22:04 PM	BCl3 MFC set to  0.000000
7/31/2011	2:22:04 PM	PHl3 MFC set to  0.000000
7/31/2011	2:22:04 PM	SiCl4 MFC set to  0.000000
7/31/2011	2:22:04 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	2:22:04 PM	Tube furnace set to 0
7/31/2011	2:22:34 PM	Helium valve closed
7/31/2011	2:22:34 PM	H2 valve closed
7/31/2011	2:22:34 PM	BCl3 valve closed
7/31/2011	2:22:34 PM	PH3 valve closed
7/31/2011	2:22:34 PM	SiCl4 pre valve closed
7/31/2011	2:22:34 PM	SiCl4 post valve closed
7/31/2011	2:22:34 PM	Bypass valve closed
7/31/2011	2:22:34 PM	Bubbler valve closed
7/31/2011	2:22:34 PM	Main Vac valve opened
7/31/2011	2:22:34 PM	Helium MFC set to  0.000000
7/31/2011	2:22:34 PM	H2 MFC set to  0.000000
7/31/2011	2:22:34 PM	BCl3 MFC set to  0.000000
7/31/2011	2:22:34 PM	PHl3 MFC set to  0.000000
7/31/2011	2:22:34 PM	SiCl4 MFC set to  0.000000
7/31/2011	2:22:34 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	2:22:34 PM	Tube furnace set to 0
7/31/2011	2:23:04 PM	H2 valve closed
7/31/2011	2:23:04 PM	BCl3 valve closed
7/31/2011	2:23:04 PM	PH3 valve closed
7/31/2011	2:23:04 PM	SiCl4 pre valve closed
7/31/2011	2:23:04 PM	SiCl4 post valve closed
7/31/2011	2:23:04 PM	Bypass valve closed
7/31/2011	2:23:04 PM	Bubbler valve closed
7/31/2011	2:23:04 PM	Helium valve opened
7/31/2011	2:23:04 PM	Main Vac valve opened
7/31/2011	2:23:04 PM	Helium MFC set to  20.000000
7/31/2011	2:23:04 PM	H2 MFC set to  0.000000
7/31/2011	2:23:04 PM	BCl3 MFC set to  0.000000
7/31/2011	2:23:04 PM	PHl3 MFC set to  0.000000
7/31/2011	2:23:04 PM	SiCl4 MFC set to  0.000000
7/31/2011	2:23:04 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	2:23:04 PM	Tube furnace set to 0
7/31/2011	2:23:34 PM	Helium valve closed
7/31/2011	2:23:34 PM	H2 valve closed
7/31/2011	2:23:34 PM	BCl3 valve closed
7/31/2011	2:23:34 PM	PH3 valve closed
7/31/2011	2:23:34 PM	SiCl4 pre valve closed
7/31/2011	2:23:34 PM	SiCl4 post valve closed
7/31/2011	2:23:34 PM	Bypass valve closed
7/31/2011	2:23:34 PM	Bubbler valve closed
7/31/2011	2:23:34 PM	Main Vac valve opened
7/31/2011	2:23:34 PM	Helium MFC set to  0.000000
7/31/2011	2:23:34 PM	H2 MFC set to  0.000000
7/31/2011	2:23:34 PM	BCl3 MFC set to  0.000000
7/31/2011	2:23:34 PM	PHl3 MFC set to  0.000000
7/31/2011	2:23:34 PM	SiCl4 MFC set to  0.000000
7/31/2011	2:23:34 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	2:23:35 PM	Tube furnace set to 0
7/31/2011	2:24:05 PM	H2 valve closed
7/31/2011	2:24:05 PM	BCl3 valve closed
7/31/2011	2:24:05 PM	PH3 valve closed
7/31/2011	2:24:05 PM	SiCl4 pre valve closed
7/31/2011	2:24:05 PM	SiCl4 post valve closed
7/31/2011	2:24:05 PM	Bypass valve closed
7/31/2011	2:24:05 PM	Bubbler valve closed
7/31/2011	2:24:05 PM	Helium valve opened
7/31/2011	2:24:05 PM	Main Vac valve opened
7/31/2011	2:24:05 PM	Helium MFC set to  20.000000
7/31/2011	2:24:05 PM	H2 MFC set to  0.000000
7/31/2011	2:24:05 PM	BCl3 MFC set to  0.000000
7/31/2011	2:24:05 PM	PHl3 MFC set to  0.000000
7/31/2011	2:24:05 PM	SiCl4 MFC set to  0.000000
7/31/2011	2:24:05 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	2:24:05 PM	Tube furnace set to 0
7/31/2011	2:24:35 PM	Helium valve closed
7/31/2011	2:24:35 PM	H2 valve closed
7/31/2011	2:24:35 PM	BCl3 valve closed
7/31/2011	2:24:35 PM	PH3 valve closed
7/31/2011	2:24:35 PM	SiCl4 pre valve closed
7/31/2011	2:24:35 PM	SiCl4 post valve closed
7/31/2011	2:24:35 PM	Bypass valve closed
7/31/2011	2:24:35 PM	Bubbler valve closed
7/31/2011	2:24:35 PM	Main Vac valve opened
7/31/2011	2:24:35 PM	Helium MFC set to  0.000000
7/31/2011	2:24:35 PM	H2 MFC set to  0.000000
7/31/2011	2:24:35 PM	BCl3 MFC set to  0.000000
7/31/2011	2:24:35 PM	PHl3 MFC set to  0.000000
7/31/2011	2:24:35 PM	SiCl4 MFC set to  0.000000
7/31/2011	2:24:35 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	2:24:35 PM	Tube furnace set to 0
7/31/2011	2:25:05 PM	H2 valve closed
7/31/2011	2:25:05 PM	BCl3 valve closed
7/31/2011	2:25:05 PM	PH3 valve closed
7/31/2011	2:25:05 PM	SiCl4 pre valve closed
7/31/2011	2:25:05 PM	SiCl4 post valve closed
7/31/2011	2:25:05 PM	Bypass valve closed
7/31/2011	2:25:05 PM	Bubbler valve closed
7/31/2011	2:25:05 PM	Helium valve opened
7/31/2011	2:25:05 PM	Main Vac valve opened
7/31/2011	2:25:05 PM	Helium MFC set to  20.000000
7/31/2011	2:25:05 PM	H2 MFC set to  0.000000
7/31/2011	2:25:05 PM	BCl3 MFC set to  0.000000
7/31/2011	2:25:05 PM	PHl3 MFC set to  0.000000
7/31/2011	2:25:05 PM	SiCl4 MFC set to  0.000000
7/31/2011	2:25:05 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	2:25:05 PM	Tube furnace set to 120
7/31/2011	2:25:35 PM	Helium valve closed
7/31/2011	2:25:35 PM	H2 valve closed
7/31/2011	2:25:35 PM	BCl3 valve closed
7/31/2011	2:25:35 PM	PH3 valve closed
7/31/2011	2:25:35 PM	SiCl4 pre valve closed
7/31/2011	2:25:35 PM	SiCl4 post valve closed
7/31/2011	2:25:35 PM	Bypass valve closed
7/31/2011	2:25:35 PM	Bubbler valve closed
7/31/2011	2:25:35 PM	Main Vac valve opened
7/31/2011	2:25:35 PM	Helium MFC set to  0.000000
7/31/2011	2:25:35 PM	H2 MFC set to  0.000000
7/31/2011	2:25:35 PM	BCl3 MFC set to  0.000000
7/31/2011	2:25:35 PM	PHl3 MFC set to  0.000000
7/31/2011	2:25:35 PM	SiCl4 MFC set to  0.000000
7/31/2011	2:25:35 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	2:25:35 PM	Tube furnace set to 120
7/31/2011	2:26:05 PM	H2 valve closed
7/31/2011	2:26:05 PM	BCl3 valve closed
7/31/2011	2:26:05 PM	PH3 valve closed
7/31/2011	2:26:05 PM	SiCl4 pre valve closed
7/31/2011	2:26:05 PM	SiCl4 post valve closed
7/31/2011	2:26:05 PM	Bypass valve closed
7/31/2011	2:26:05 PM	Bubbler valve closed
7/31/2011	2:26:05 PM	Helium valve opened
7/31/2011	2:26:05 PM	Main Vac valve opened
7/31/2011	2:26:05 PM	Helium MFC set to  20.000000
7/31/2011	2:26:05 PM	H2 MFC set to  0.000000
7/31/2011	2:26:05 PM	BCl3 MFC set to  0.000000
7/31/2011	2:26:05 PM	PHl3 MFC set to  0.000000
7/31/2011	2:26:05 PM	SiCl4 MFC set to  0.000000
7/31/2011	2:26:05 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	2:26:06 PM	Tube furnace set to 120
7/31/2011	2:26:36 PM	Helium valve closed
7/31/2011	2:26:36 PM	H2 valve closed
7/31/2011	2:26:36 PM	BCl3 valve closed
7/31/2011	2:26:36 PM	PH3 valve closed
7/31/2011	2:26:36 PM	SiCl4 pre valve closed
7/31/2011	2:26:36 PM	SiCl4 post valve closed
7/31/2011	2:26:36 PM	Bypass valve closed
7/31/2011	2:26:36 PM	Bubbler valve closed
7/31/2011	2:26:36 PM	Main Vac valve opened
7/31/2011	2:26:36 PM	Helium MFC set to  0.000000
7/31/2011	2:26:36 PM	H2 MFC set to  0.000000
7/31/2011	2:26:36 PM	BCl3 MFC set to  0.000000
7/31/2011	2:26:36 PM	PHl3 MFC set to  0.000000
7/31/2011	2:26:36 PM	SiCl4 MFC set to  0.000000
7/31/2011	2:26:36 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	2:26:36 PM	Tube furnace set to 120
7/31/2011	2:27:06 PM	H2 valve closed
7/31/2011	2:27:06 PM	BCl3 valve closed
7/31/2011	2:27:06 PM	PH3 valve closed
7/31/2011	2:27:06 PM	SiCl4 pre valve closed
7/31/2011	2:27:06 PM	SiCl4 post valve closed
7/31/2011	2:27:06 PM	Bypass valve closed
7/31/2011	2:27:06 PM	Bubbler valve closed
7/31/2011	2:27:06 PM	Helium valve opened
7/31/2011	2:27:06 PM	Main Vac valve opened
7/31/2011	2:27:06 PM	Helium MFC set to  20.000000
7/31/2011	2:27:06 PM	H2 MFC set to  0.000000
7/31/2011	2:27:06 PM	BCl3 MFC set to  0.000000
7/31/2011	2:27:06 PM	PHl3 MFC set to  0.000000
7/31/2011	2:27:06 PM	SiCl4 MFC set to  0.000000
7/31/2011	2:27:06 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	2:27:06 PM	Tube furnace set to 120
7/31/2011	2:27:36 PM	Helium valve closed
7/31/2011	2:27:36 PM	H2 valve closed
7/31/2011	2:27:36 PM	BCl3 valve closed
7/31/2011	2:27:36 PM	PH3 valve closed
7/31/2011	2:27:36 PM	SiCl4 pre valve closed
7/31/2011	2:27:36 PM	SiCl4 post valve closed
7/31/2011	2:27:36 PM	Bypass valve closed
7/31/2011	2:27:36 PM	Bubbler valve closed
7/31/2011	2:27:36 PM	Main Vac valve opened
7/31/2011	2:27:36 PM	Helium MFC set to  0.000000
7/31/2011	2:27:36 PM	H2 MFC set to  0.000000
7/31/2011	2:27:36 PM	BCl3 MFC set to  0.000000
7/31/2011	2:27:36 PM	PHl3 MFC set to  0.000000
7/31/2011	2:27:36 PM	SiCl4 MFC set to  0.000000
7/31/2011	2:27:36 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	2:27:36 PM	Tube furnace set to 120
7/31/2011	2:28:06 PM	H2 valve closed
7/31/2011	2:28:06 PM	BCl3 valve closed
7/31/2011	2:28:06 PM	PH3 valve closed
7/31/2011	2:28:06 PM	SiCl4 pre valve closed
7/31/2011	2:28:06 PM	SiCl4 post valve closed
7/31/2011	2:28:06 PM	Bypass valve closed
7/31/2011	2:28:06 PM	Bubbler valve closed
7/31/2011	2:28:06 PM	Helium valve opened
7/31/2011	2:28:06 PM	Main Vac valve opened
7/31/2011	2:28:06 PM	Helium MFC set to  20.000000
7/31/2011	2:28:06 PM	H2 MFC set to  0.000000
7/31/2011	2:28:06 PM	BCl3 MFC set to  0.000000
7/31/2011	2:28:06 PM	PHl3 MFC set to  0.000000
7/31/2011	2:28:06 PM	SiCl4 MFC set to  0.000000
7/31/2011	2:28:06 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	2:28:06 PM	Tube furnace set to 120
7/31/2011	2:28:36 PM	Helium valve closed
7/31/2011	2:28:36 PM	H2 valve closed
7/31/2011	2:28:36 PM	BCl3 valve closed
7/31/2011	2:28:36 PM	PH3 valve closed
7/31/2011	2:28:36 PM	SiCl4 pre valve closed
7/31/2011	2:28:36 PM	SiCl4 post valve closed
7/31/2011	2:28:36 PM	Bypass valve closed
7/31/2011	2:28:36 PM	Bubbler valve closed
7/31/2011	2:28:36 PM	Main Vac valve opened
7/31/2011	2:28:36 PM	Helium MFC set to  0.000000
7/31/2011	2:28:36 PM	H2 MFC set to  0.000000
7/31/2011	2:28:36 PM	BCl3 MFC set to  0.000000
7/31/2011	2:28:36 PM	PHl3 MFC set to  0.000000
7/31/2011	2:28:36 PM	SiCl4 MFC set to  0.000000
7/31/2011	2:28:36 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	2:28:37 PM	Tube furnace set to 120
7/31/2011	2:29:07 PM	H2 valve closed
7/31/2011	2:29:07 PM	BCl3 valve closed
7/31/2011	2:29:07 PM	PH3 valve closed
7/31/2011	2:29:07 PM	SiCl4 pre valve closed
7/31/2011	2:29:07 PM	SiCl4 post valve closed
7/31/2011	2:29:07 PM	Bypass valve closed
7/31/2011	2:29:07 PM	Bubbler valve closed
7/31/2011	2:29:07 PM	Helium valve opened
7/31/2011	2:29:07 PM	Main Vac valve opened
7/31/2011	2:29:07 PM	Helium MFC set to  20.000000
7/31/2011	2:29:07 PM	H2 MFC set to  0.000000
7/31/2011	2:29:07 PM	BCl3 MFC set to  0.000000
7/31/2011	2:29:07 PM	PHl3 MFC set to  0.000000
7/31/2011	2:29:07 PM	SiCl4 MFC set to  0.000000
7/31/2011	2:29:07 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	2:29:07 PM	Tube furnace set to 120
7/31/2011	2:29:37 PM	Helium valve closed
7/31/2011	2:29:37 PM	H2 valve closed
7/31/2011	2:29:37 PM	BCl3 valve closed
7/31/2011	2:29:37 PM	PH3 valve closed
7/31/2011	2:29:37 PM	SiCl4 pre valve closed
7/31/2011	2:29:37 PM	SiCl4 post valve closed
7/31/2011	2:29:37 PM	Bypass valve closed
7/31/2011	2:29:37 PM	Bubbler valve closed
7/31/2011	2:29:37 PM	Main Vac valve opened
7/31/2011	2:29:37 PM	Helium MFC set to  0.000000
7/31/2011	2:29:37 PM	H2 MFC set to  0.000000
7/31/2011	2:29:37 PM	BCl3 MFC set to  0.000000
7/31/2011	2:29:37 PM	PHl3 MFC set to  0.000000
7/31/2011	2:29:37 PM	SiCl4 MFC set to  0.000000
7/31/2011	2:29:37 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	2:29:37 PM	Tube furnace set to 120
7/31/2011	2:30:07 PM	H2 valve closed
7/31/2011	2:30:07 PM	BCl3 valve closed
7/31/2011	2:30:07 PM	PH3 valve closed
7/31/2011	2:30:07 PM	SiCl4 pre valve closed
7/31/2011	2:30:07 PM	SiCl4 post valve closed
7/31/2011	2:30:07 PM	Bypass valve closed
7/31/2011	2:30:07 PM	Bubbler valve closed
7/31/2011	2:30:07 PM	Helium valve opened
7/31/2011	2:30:07 PM	Main Vac valve opened
7/31/2011	2:30:07 PM	Helium MFC set to  20.000000
7/31/2011	2:30:07 PM	H2 MFC set to  0.000000
7/31/2011	2:30:07 PM	BCl3 MFC set to  0.000000
7/31/2011	2:30:07 PM	PHl3 MFC set to  0.000000
7/31/2011	2:30:07 PM	SiCl4 MFC set to  0.000000
7/31/2011	2:30:07 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	2:30:07 PM	Tube furnace set to 120
7/31/2011	2:30:37 PM	Helium valve closed
7/31/2011	2:30:37 PM	H2 valve closed
7/31/2011	2:30:37 PM	BCl3 valve closed
7/31/2011	2:30:37 PM	PH3 valve closed
7/31/2011	2:30:37 PM	SiCl4 pre valve closed
7/31/2011	2:30:37 PM	SiCl4 post valve closed
7/31/2011	2:30:37 PM	Bypass valve closed
7/31/2011	2:30:37 PM	Bubbler valve closed
7/31/2011	2:30:37 PM	Main Vac valve opened
7/31/2011	2:30:37 PM	Helium MFC set to  0.000000
7/31/2011	2:30:37 PM	H2 MFC set to  0.000000
7/31/2011	2:30:37 PM	BCl3 MFC set to  0.000000
7/31/2011	2:30:37 PM	PHl3 MFC set to  0.000000
7/31/2011	2:30:37 PM	SiCl4 MFC set to  0.000000
7/31/2011	2:30:37 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	2:30:37 PM	Tube furnace set to 120
7/31/2011	2:30:38 PM	Run finished at 2:30 PM
7/31/2011	4:09:13 PM	Main Vac valve closed
7/31/2011	4:09:26 PM	Main Vac valve opened
7/31/2011	4:11:43 PM	Recipe started at 4:11 PM
7/31/2011	4:11:43 PM	Helium valve closed
7/31/2011	4:11:43 PM	BCl3 valve closed
7/31/2011	4:11:43 PM	PH3 valve closed
7/31/2011	4:11:43 PM	SiCl4 pre valve closed
7/31/2011	4:11:43 PM	SiCl4 post valve closed
7/31/2011	4:11:43 PM	Main Vac valve closed
7/31/2011	4:11:43 PM	Bypass valve closed
7/31/2011	4:11:43 PM	Bubbler valve closed
7/31/2011	4:11:43 PM	H2 valve opened
7/31/2011	4:11:43 PM	Helium MFC set to  0.000000
7/31/2011	4:11:43 PM	H2 MFC set to  500.000000
7/31/2011	4:11:43 PM	BCl3 MFC set to  0.000000
7/31/2011	4:11:43 PM	PHl3 MFC set to  0.000000
7/31/2011	4:11:43 PM	SiCl4 MFC set to  0.000000
7/31/2011	4:11:43 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	4:11:43 PM	Tube furnace set to 0
7/31/2011	4:12:48 PM	Helium valve closed
7/31/2011	4:12:48 PM	BCl3 valve closed
7/31/2011	4:12:48 PM	PH3 valve closed
7/31/2011	4:12:48 PM	SiCl4 pre valve closed
7/31/2011	4:12:48 PM	SiCl4 post valve closed
7/31/2011	4:12:48 PM	Main Vac valve closed
7/31/2011	4:12:48 PM	Bypass valve closed
7/31/2011	4:12:48 PM	H2 valve opened
7/31/2011	4:12:48 PM	Bubbler valve opened
7/31/2011	4:12:48 PM	Helium MFC set to  0.000000
7/31/2011	4:12:48 PM	H2 MFC set to  500.000000
7/31/2011	4:12:48 PM	BCl3 MFC set to  0.000000
7/31/2011	4:12:48 PM	PHl3 MFC set to  0.000000
7/31/2011	4:12:48 PM	SiCl4 MFC set to  0.000000
7/31/2011	4:12:48 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	4:12:48 PM	Tube furnace set to 1010
7/31/2011	4:31:08 PM	Helium valve closed
7/31/2011	4:31:08 PM	PH3 valve closed
7/31/2011	4:31:08 PM	Main Vac valve closed
7/31/2011	4:31:08 PM	Bypass valve closed
7/31/2011	4:31:08 PM	H2 valve opened
7/31/2011	4:31:08 PM	BCl3 valve opened
7/31/2011	4:31:08 PM	SiCl4 pre valve opened
7/31/2011	4:31:08 PM	SiCl4 post valve opened
7/31/2011	4:31:08 PM	Bubbler valve opened
7/31/2011	4:31:08 PM	Helium MFC set to  0.000000
7/31/2011	4:31:08 PM	H2 MFC set to  500.000000
7/31/2011	4:31:08 PM	BCl3 MFC set to  2.000000
7/31/2011	4:31:08 PM	PHl3 MFC set to  0.000000
7/31/2011	4:31:08 PM	SiCl4 MFC set to  50.000000
7/31/2011	4:31:08 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	4:31:08 PM	Tube furnace set to 1010
7/31/2011	4:47:08 PM	Helium valve closed
7/31/2011	4:47:08 PM	BCl3 valve closed
7/31/2011	4:47:08 PM	PH3 valve closed
7/31/2011	4:47:08 PM	SiCl4 pre valve closed
7/31/2011	4:47:08 PM	SiCl4 post valve closed
7/31/2011	4:47:08 PM	Main Vac valve closed
7/31/2011	4:47:08 PM	Bypass valve closed
7/31/2011	4:47:08 PM	H2 valve opened
7/31/2011	4:47:08 PM	Bubbler valve opened
7/31/2011	4:47:08 PM	Helium MFC set to  0.000000
7/31/2011	4:47:08 PM	H2 MFC set to  500.000000
7/31/2011	4:47:08 PM	BCl3 MFC set to  0.000000
7/31/2011	4:47:08 PM	PHl3 MFC set to  0.000000
7/31/2011	4:47:08 PM	SiCl4 MFC set to  0.000000
7/31/2011	4:47:08 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	4:47:08 PM	Tube furnace set to 975
7/31/2011	4:48:08 PM	Helium valve closed
7/31/2011	4:48:08 PM	BCl3 valve closed
7/31/2011	4:48:08 PM	PH3 valve closed
7/31/2011	4:48:08 PM	SiCl4 pre valve closed
7/31/2011	4:48:08 PM	SiCl4 post valve closed
7/31/2011	4:48:08 PM	Main Vac valve closed
7/31/2011	4:48:08 PM	Bypass valve closed
7/31/2011	4:48:08 PM	H2 valve opened
7/31/2011	4:48:08 PM	Bubbler valve opened
7/31/2011	4:48:08 PM	Helium MFC set to  0.000000
7/31/2011	4:48:08 PM	H2 MFC set to  500.000000
7/31/2011	4:48:08 PM	BCl3 MFC set to  0.000000
7/31/2011	4:48:08 PM	PHl3 MFC set to  0.000000
7/31/2011	4:48:08 PM	SiCl4 MFC set to  0.000000
7/31/2011	4:48:08 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	4:48:09 PM	Tube furnace set to 950
7/31/2011	4:49:09 PM	Helium valve closed
7/31/2011	4:49:09 PM	BCl3 valve closed
7/31/2011	4:49:09 PM	PH3 valve closed
7/31/2011	4:49:09 PM	SiCl4 pre valve closed
7/31/2011	4:49:09 PM	SiCl4 post valve closed
7/31/2011	4:49:09 PM	Main Vac valve closed
7/31/2011	4:49:09 PM	Bypass valve closed
7/31/2011	4:49:09 PM	H2 valve opened
7/31/2011	4:49:09 PM	Bubbler valve opened
7/31/2011	4:49:09 PM	Helium MFC set to  0.000000
7/31/2011	4:49:09 PM	H2 MFC set to  500.000000
7/31/2011	4:49:09 PM	BCl3 MFC set to  0.000000
7/31/2011	4:49:09 PM	PHl3 MFC set to  0.000000
7/31/2011	4:49:09 PM	SiCl4 MFC set to  0.000000
7/31/2011	4:49:09 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	4:49:09 PM	Tube furnace set to 925
7/31/2011	4:50:09 PM	Helium valve closed
7/31/2011	4:50:09 PM	BCl3 valve closed
7/31/2011	4:50:09 PM	PH3 valve closed
7/31/2011	4:50:09 PM	SiCl4 pre valve closed
7/31/2011	4:50:09 PM	SiCl4 post valve closed
7/31/2011	4:50:09 PM	Main Vac valve closed
7/31/2011	4:50:09 PM	Bypass valve closed
7/31/2011	4:50:09 PM	H2 valve opened
7/31/2011	4:50:09 PM	Bubbler valve opened
7/31/2011	4:50:09 PM	Helium MFC set to  0.000000
7/31/2011	4:50:09 PM	H2 MFC set to  500.000000
7/31/2011	4:50:09 PM	BCl3 MFC set to  0.000000
7/31/2011	4:50:09 PM	PHl3 MFC set to  0.000000
7/31/2011	4:50:09 PM	SiCl4 MFC set to  0.000000
7/31/2011	4:50:09 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	4:50:09 PM	Tube furnace set to 900
7/31/2011	4:51:09 PM	Helium valve closed
7/31/2011	4:51:09 PM	BCl3 valve closed
7/31/2011	4:51:09 PM	PH3 valve closed
7/31/2011	4:51:09 PM	SiCl4 pre valve closed
7/31/2011	4:51:09 PM	SiCl4 post valve closed
7/31/2011	4:51:09 PM	Main Vac valve closed
7/31/2011	4:51:09 PM	Bypass valve closed
7/31/2011	4:51:09 PM	H2 valve opened
7/31/2011	4:51:09 PM	Bubbler valve opened
7/31/2011	4:51:09 PM	Helium MFC set to  0.000000
7/31/2011	4:51:09 PM	H2 MFC set to  500.000000
7/31/2011	4:51:09 PM	BCl3 MFC set to  0.000000
7/31/2011	4:51:09 PM	PHl3 MFC set to  0.000000
7/31/2011	4:51:09 PM	SiCl4 MFC set to  0.000000
7/31/2011	4:51:09 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	4:51:09 PM	Tube furnace set to 850
7/31/2011	4:52:39 PM	Helium valve closed
7/31/2011	4:52:39 PM	BCl3 valve closed
7/31/2011	4:52:39 PM	PH3 valve closed
7/31/2011	4:52:39 PM	SiCl4 pre valve closed
7/31/2011	4:52:39 PM	SiCl4 post valve closed
7/31/2011	4:52:39 PM	Main Vac valve closed
7/31/2011	4:52:39 PM	Bypass valve closed
7/31/2011	4:52:39 PM	H2 valve opened
7/31/2011	4:52:39 PM	Bubbler valve opened
7/31/2011	4:52:39 PM	Helium MFC set to  0.000000
7/31/2011	4:52:39 PM	H2 MFC set to  500.000000
7/31/2011	4:52:39 PM	BCl3 MFC set to  0.000000
7/31/2011	4:52:39 PM	PHl3 MFC set to  0.000000
7/31/2011	4:52:39 PM	SiCl4 MFC set to  0.000000
7/31/2011	4:52:39 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	4:52:39 PM	Tube furnace set to 800
7/31/2011	4:54:09 PM	H2 valve closed
7/31/2011	4:54:09 PM	BCl3 valve closed
7/31/2011	4:54:09 PM	PH3 valve closed
7/31/2011	4:54:09 PM	SiCl4 pre valve closed
7/31/2011	4:54:09 PM	SiCl4 post valve closed
7/31/2011	4:54:09 PM	Main Vac valve closed
7/31/2011	4:54:09 PM	Bypass valve closed
7/31/2011	4:54:09 PM	Helium valve opened
7/31/2011	4:54:09 PM	Bubbler valve opened
7/31/2011	4:54:09 PM	Helium MFC set to  500.000000
7/31/2011	4:54:09 PM	H2 MFC set to  0.000000
7/31/2011	4:54:09 PM	BCl3 MFC set to  0.000000
7/31/2011	4:54:09 PM	PHl3 MFC set to  0.000000
7/31/2011	4:54:09 PM	SiCl4 MFC set to  0.000000
7/31/2011	4:54:09 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	4:54:10 PM	Tube furnace set to 0
7/31/2011	5:14:09 PM	Helium valve closed
7/31/2011	5:14:09 PM	H2 valve closed
7/31/2011	5:14:09 PM	BCl3 valve closed
7/31/2011	5:14:09 PM	PH3 valve closed
7/31/2011	5:14:09 PM	SiCl4 pre valve closed
7/31/2011	5:14:09 PM	SiCl4 post valve closed
7/31/2011	5:14:09 PM	Main Vac valve closed
7/31/2011	5:14:09 PM	Bypass valve closed
7/31/2011	5:14:09 PM	Bubbler valve closed
7/31/2011	5:14:10 PM	Helium MFC set to  0.000000
7/31/2011	5:14:10 PM	H2 MFC set to  0.000000
7/31/2011	5:14:10 PM	BCl3 MFC set to  0.000000
7/31/2011	5:14:10 PM	PHl3 MFC set to  0.000000
7/31/2011	5:14:10 PM	SiCl4 MFC set to  0.000000
7/31/2011	5:14:10 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	5:14:10 PM	Tube furnace set to 0
7/31/2011	6:00:46 PM	Run aborted at 6:00 PM
7/31/2011	6:00:46 PM	Helium valve closed
7/31/2011	6:00:46 PM	H2 valve closed
7/31/2011	6:00:46 PM	BCl3 valve closed
7/31/2011	6:00:46 PM	PH3 valve closed
7/31/2011	6:00:46 PM	SiCl4 pre valve closed
7/31/2011	6:00:46 PM	SiCl4 post valve closed
7/31/2011	6:00:46 PM	Bypass valve closed
7/31/2011	6:00:46 PM	Main Vac valve closed
7/31/2011	6:00:46 PM	Bubbler valve closed
7/31/2011	6:00:46 PM	Helium MFC set to  0.000000
7/31/2011	6:00:46 PM	H2 MFC set to  0.000000
7/31/2011	6:00:46 PM	BCl3 MFC set to  0.000000
7/31/2011	6:00:46 PM	PHl3 MFC set to  0.000000
7/31/2011	6:00:46 PM	SiCl4 MFC set to  0.000000
7/31/2011	6:00:47 PM	Tube furnace set to 0
7/31/2011	6:00:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/31/2011	6:00:49 PM	Recipe started at 6:00 PM
7/31/2011	6:00:49 PM	Helium valve closed
7/31/2011	6:00:49 PM	H2 valve closed
7/31/2011	6:00:49 PM	BCl3 valve closed
7/31/2011	6:00:49 PM	PH3 valve closed
7/31/2011	6:00:49 PM	SiCl4 pre valve closed
7/31/2011	6:00:49 PM	SiCl4 post valve closed
7/31/2011	6:00:49 PM	Main Vac valve closed
7/31/2011	6:00:49 PM	Bypass valve closed
7/31/2011	6:00:49 PM	Bubbler valve closed
7/31/2011	6:00:49 PM	Helium MFC set to  0.000000
7/31/2011	6:00:49 PM	H2 MFC set to  0.000000
7/31/2011	6:00:49 PM	BCl3 MFC set to  0.000000
7/31/2011	6:00:49 PM	PHl3 MFC set to  0.000000
7/31/2011	6:00:49 PM	SiCl4 MFC set to  0.000000
7/31/2011	6:00:49 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	6:00:50 PM	Tube furnace set to 0
7/31/2011	6:00:53 PM	H2 valve closed
7/31/2011	6:00:53 PM	BCl3 valve closed
7/31/2011	6:00:53 PM	PH3 valve closed
7/31/2011	6:00:53 PM	SiCl4 pre valve closed
7/31/2011	6:00:53 PM	SiCl4 post valve closed
7/31/2011	6:00:53 PM	Main Vac valve closed
7/31/2011	6:00:53 PM	Bypass valve closed
7/31/2011	6:00:53 PM	Bubbler valve closed
7/31/2011	6:00:53 PM	Helium valve opened
7/31/2011	6:00:53 PM	Helium MFC set to  500.000000
7/31/2011	6:00:53 PM	H2 MFC set to  0.000000
7/31/2011	6:00:53 PM	BCl3 MFC set to  0.000000
7/31/2011	6:00:53 PM	PHl3 MFC set to  0.000000
7/31/2011	6:00:53 PM	SiCl4 MFC set to  0.000000
7/31/2011	6:00:53 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	6:00:53 PM	Tube furnace set to 0
7/31/2011	6:00:58 PM	Helium valve closed
7/31/2011	6:00:58 PM	H2 valve closed
7/31/2011	6:00:58 PM	BCl3 valve closed
7/31/2011	6:00:58 PM	PH3 valve closed
7/31/2011	6:00:58 PM	SiCl4 pre valve closed
7/31/2011	6:00:58 PM	SiCl4 post valve closed
7/31/2011	6:00:58 PM	Main Vac valve closed
7/31/2011	6:00:58 PM	Bypass valve closed
7/31/2011	6:00:58 PM	Bubbler valve closed
7/31/2011	6:00:58 PM	Helium MFC set to  0.000000
7/31/2011	6:00:58 PM	H2 MFC set to  0.000000
7/31/2011	6:00:58 PM	BCl3 MFC set to  0.000000
7/31/2011	6:00:58 PM	PHl3 MFC set to  0.000000
7/31/2011	6:00:58 PM	SiCl4 MFC set to  0.000000
7/31/2011	6:00:58 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	6:00:58 PM	Tube furnace set to 0
7/31/2011	6:00:59 PM	Run finished at 6:00 PM
7/31/2011	6:00:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/31/2011	6:03:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/31/2011	6:03:59 PM	Recipe started at 6:03 PM
7/31/2011	6:03:59 PM	Helium valve closed
7/31/2011	6:03:59 PM	H2 valve closed
7/31/2011	6:03:59 PM	BCl3 valve closed
7/31/2011	6:03:59 PM	PH3 valve closed
7/31/2011	6:03:59 PM	SiCl4 pre valve closed
7/31/2011	6:03:59 PM	SiCl4 post valve closed
7/31/2011	6:03:59 PM	Main Vac valve closed
7/31/2011	6:03:59 PM	Bubbler valve closed
7/31/2011	6:03:59 PM	Bypass valve opened
7/31/2011	6:03:59 PM	Helium MFC set to  0.000000
7/31/2011	6:03:59 PM	H2 MFC set to  0.000000
7/31/2011	6:03:59 PM	BCl3 MFC set to  0.000000
7/31/2011	6:03:59 PM	PHl3 MFC set to  0.000000
7/31/2011	6:03:59 PM	SiCl4 MFC set to  0.000000
7/31/2011	6:03:59 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	6:03:59 PM	Tube furnace set to 0
7/31/2011	6:05:02 PM	Helium valve closed
7/31/2011	6:05:02 PM	H2 valve closed
7/31/2011	6:05:02 PM	BCl3 valve closed
7/31/2011	6:05:02 PM	PH3 valve closed
7/31/2011	6:05:02 PM	SiCl4 pre valve closed
7/31/2011	6:05:02 PM	SiCl4 post valve closed
7/31/2011	6:05:02 PM	Main Vac valve closed
7/31/2011	6:05:02 PM	Bubbler valve closed
7/31/2011	6:05:02 PM	Bypass valve opened
7/31/2011	6:05:02 PM	Helium MFC set to  0.000000
7/31/2011	6:05:02 PM	H2 MFC set to  0.000000
7/31/2011	6:05:02 PM	BCl3 MFC set to  0.000000
7/31/2011	6:05:02 PM	PHl3 MFC set to  0.000000
7/31/2011	6:05:02 PM	SiCl4 MFC set to  0.000000
7/31/2011	6:05:02 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	6:05:03 PM	Tube furnace set to 0
7/31/2011	6:06:03 PM	Helium valve closed
7/31/2011	6:06:03 PM	H2 valve closed
7/31/2011	6:06:03 PM	BCl3 valve closed
7/31/2011	6:06:03 PM	PH3 valve closed
7/31/2011	6:06:03 PM	SiCl4 pre valve closed
7/31/2011	6:06:03 PM	SiCl4 post valve closed
7/31/2011	6:06:03 PM	Bypass valve closed
7/31/2011	6:06:03 PM	Bubbler valve closed
7/31/2011	6:06:03 PM	Main Vac valve opened
7/31/2011	6:06:03 PM	Helium MFC set to  0.000000
7/31/2011	6:06:03 PM	H2 MFC set to  0.000000
7/31/2011	6:06:03 PM	BCl3 MFC set to  0.000000
7/31/2011	6:06:03 PM	PHl3 MFC set to  0.000000
7/31/2011	6:06:03 PM	SiCl4 MFC set to  0.000000
7/31/2011	6:06:03 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	6:06:03 PM	Tube furnace set to 0
7/31/2011	6:06:04 PM	Run finished at 6:06 PM
7/31/2011	6:06:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/31/2011	6:21:48 PM	Recipe started at 6:21 PM
7/31/2011	6:21:48 PM	Helium valve closed
7/31/2011	6:21:48 PM	H2 valve closed
7/31/2011	6:21:48 PM	BCl3 valve closed
7/31/2011	6:21:48 PM	PH3 valve closed
7/31/2011	6:21:48 PM	SiCl4 pre valve closed
7/31/2011	6:21:48 PM	SiCl4 post valve closed
7/31/2011	6:21:48 PM	Bypass valve closed
7/31/2011	6:21:48 PM	Bubbler valve closed
7/31/2011	6:21:48 PM	Main Vac valve opened
7/31/2011	6:21:48 PM	Helium MFC set to  0.000000
7/31/2011	6:21:48 PM	H2 MFC set to  0.000000
7/31/2011	6:21:48 PM	BCl3 MFC set to  0.000000
7/31/2011	6:21:48 PM	PHl3 MFC set to  0.000000
7/31/2011	6:21:48 PM	SiCl4 MFC set to  0.000000
7/31/2011	6:21:48 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	6:21:49 PM	Tube furnace set to 0
7/31/2011	6:22:19 PM	H2 valve closed
7/31/2011	6:22:19 PM	BCl3 valve closed
7/31/2011	6:22:19 PM	PH3 valve closed
7/31/2011	6:22:19 PM	SiCl4 pre valve closed
7/31/2011	6:22:19 PM	SiCl4 post valve closed
7/31/2011	6:22:19 PM	Bypass valve closed
7/31/2011	6:22:19 PM	Bubbler valve closed
7/31/2011	6:22:19 PM	Helium valve opened
7/31/2011	6:22:19 PM	Main Vac valve opened
7/31/2011	6:22:19 PM	Helium MFC set to  20.000000
7/31/2011	6:22:19 PM	H2 MFC set to  0.000000
7/31/2011	6:22:19 PM	BCl3 MFC set to  0.000000
7/31/2011	6:22:19 PM	PHl3 MFC set to  0.000000
7/31/2011	6:22:19 PM	SiCl4 MFC set to  0.000000
7/31/2011	6:22:19 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	6:22:19 PM	Tube furnace set to 0
7/31/2011	6:22:49 PM	Helium valve closed
7/31/2011	6:22:49 PM	H2 valve closed
7/31/2011	6:22:49 PM	BCl3 valve closed
7/31/2011	6:22:49 PM	PH3 valve closed
7/31/2011	6:22:49 PM	SiCl4 pre valve closed
7/31/2011	6:22:49 PM	SiCl4 post valve closed
7/31/2011	6:22:49 PM	Bypass valve closed
7/31/2011	6:22:49 PM	Bubbler valve closed
7/31/2011	6:22:49 PM	Main Vac valve opened
7/31/2011	6:22:49 PM	Helium MFC set to  0.000000
7/31/2011	6:22:49 PM	H2 MFC set to  0.000000
7/31/2011	6:22:49 PM	BCl3 MFC set to  0.000000
7/31/2011	6:22:49 PM	PHl3 MFC set to  0.000000
7/31/2011	6:22:49 PM	SiCl4 MFC set to  0.000000
7/31/2011	6:22:49 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	6:22:49 PM	Tube furnace set to 0
7/31/2011	6:23:19 PM	H2 valve closed
7/31/2011	6:23:19 PM	BCl3 valve closed
7/31/2011	6:23:19 PM	PH3 valve closed
7/31/2011	6:23:19 PM	SiCl4 pre valve closed
7/31/2011	6:23:19 PM	SiCl4 post valve closed
7/31/2011	6:23:19 PM	Bypass valve closed
7/31/2011	6:23:19 PM	Bubbler valve closed
7/31/2011	6:23:19 PM	Helium valve opened
7/31/2011	6:23:19 PM	Main Vac valve opened
7/31/2011	6:23:19 PM	Helium MFC set to  20.000000
7/31/2011	6:23:19 PM	H2 MFC set to  0.000000
7/31/2011	6:23:19 PM	BCl3 MFC set to  0.000000
7/31/2011	6:23:19 PM	PHl3 MFC set to  0.000000
7/31/2011	6:23:19 PM	SiCl4 MFC set to  0.000000
7/31/2011	6:23:19 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	6:23:19 PM	Tube furnace set to 0
7/31/2011	6:23:49 PM	Helium valve closed
7/31/2011	6:23:49 PM	H2 valve closed
7/31/2011	6:23:49 PM	BCl3 valve closed
7/31/2011	6:23:49 PM	PH3 valve closed
7/31/2011	6:23:49 PM	SiCl4 pre valve closed
7/31/2011	6:23:49 PM	SiCl4 post valve closed
7/31/2011	6:23:49 PM	Bypass valve closed
7/31/2011	6:23:49 PM	Bubbler valve closed
7/31/2011	6:23:49 PM	Main Vac valve opened
7/31/2011	6:23:49 PM	Helium MFC set to  0.000000
7/31/2011	6:23:49 PM	H2 MFC set to  0.000000
7/31/2011	6:23:49 PM	BCl3 MFC set to  0.000000
7/31/2011	6:23:49 PM	PHl3 MFC set to  0.000000
7/31/2011	6:23:49 PM	SiCl4 MFC set to  0.000000
7/31/2011	6:23:49 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	6:23:49 PM	Tube furnace set to 0
7/31/2011	6:24:19 PM	H2 valve closed
7/31/2011	6:24:19 PM	BCl3 valve closed
7/31/2011	6:24:19 PM	PH3 valve closed
7/31/2011	6:24:19 PM	SiCl4 pre valve closed
7/31/2011	6:24:19 PM	SiCl4 post valve closed
7/31/2011	6:24:19 PM	Bypass valve closed
7/31/2011	6:24:19 PM	Bubbler valve closed
7/31/2011	6:24:19 PM	Helium valve opened
7/31/2011	6:24:19 PM	Main Vac valve opened
7/31/2011	6:24:19 PM	Helium MFC set to  20.000000
7/31/2011	6:24:19 PM	H2 MFC set to  0.000000
7/31/2011	6:24:19 PM	BCl3 MFC set to  0.000000
7/31/2011	6:24:19 PM	PHl3 MFC set to  0.000000
7/31/2011	6:24:19 PM	SiCl4 MFC set to  0.000000
7/31/2011	6:24:19 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	6:24:20 PM	Tube furnace set to 0
7/31/2011	6:24:50 PM	Helium valve closed
7/31/2011	6:24:50 PM	H2 valve closed
7/31/2011	6:24:50 PM	BCl3 valve closed
7/31/2011	6:24:50 PM	PH3 valve closed
7/31/2011	6:24:50 PM	SiCl4 pre valve closed
7/31/2011	6:24:50 PM	SiCl4 post valve closed
7/31/2011	6:24:50 PM	Bypass valve closed
7/31/2011	6:24:50 PM	Bubbler valve closed
7/31/2011	6:24:50 PM	Main Vac valve opened
7/31/2011	6:24:50 PM	Helium MFC set to  0.000000
7/31/2011	6:24:50 PM	H2 MFC set to  0.000000
7/31/2011	6:24:50 PM	BCl3 MFC set to  0.000000
7/31/2011	6:24:50 PM	PHl3 MFC set to  0.000000
7/31/2011	6:24:50 PM	SiCl4 MFC set to  0.000000
7/31/2011	6:24:50 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	6:24:50 PM	Tube furnace set to 0
7/31/2011	6:25:20 PM	H2 valve closed
7/31/2011	6:25:20 PM	BCl3 valve closed
7/31/2011	6:25:20 PM	PH3 valve closed
7/31/2011	6:25:20 PM	SiCl4 pre valve closed
7/31/2011	6:25:20 PM	SiCl4 post valve closed
7/31/2011	6:25:20 PM	Bypass valve closed
7/31/2011	6:25:20 PM	Bubbler valve closed
7/31/2011	6:25:20 PM	Helium valve opened
7/31/2011	6:25:20 PM	Main Vac valve opened
7/31/2011	6:25:20 PM	Helium MFC set to  20.000000
7/31/2011	6:25:20 PM	H2 MFC set to  0.000000
7/31/2011	6:25:20 PM	BCl3 MFC set to  0.000000
7/31/2011	6:25:20 PM	PHl3 MFC set to  0.000000
7/31/2011	6:25:20 PM	SiCl4 MFC set to  0.000000
7/31/2011	6:25:20 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	6:25:20 PM	Tube furnace set to 0
7/31/2011	6:25:50 PM	Helium valve closed
7/31/2011	6:25:50 PM	H2 valve closed
7/31/2011	6:25:50 PM	BCl3 valve closed
7/31/2011	6:25:50 PM	PH3 valve closed
7/31/2011	6:25:50 PM	SiCl4 pre valve closed
7/31/2011	6:25:50 PM	SiCl4 post valve closed
7/31/2011	6:25:50 PM	Bypass valve closed
7/31/2011	6:25:50 PM	Bubbler valve closed
7/31/2011	6:25:50 PM	Main Vac valve opened
7/31/2011	6:25:50 PM	Helium MFC set to  0.000000
7/31/2011	6:25:50 PM	H2 MFC set to  0.000000
7/31/2011	6:25:50 PM	BCl3 MFC set to  0.000000
7/31/2011	6:25:50 PM	PHl3 MFC set to  0.000000
7/31/2011	6:25:50 PM	SiCl4 MFC set to  0.000000
7/31/2011	6:25:50 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	6:25:50 PM	Tube furnace set to 0
7/31/2011	6:26:20 PM	H2 valve closed
7/31/2011	6:26:20 PM	BCl3 valve closed
7/31/2011	6:26:20 PM	PH3 valve closed
7/31/2011	6:26:20 PM	SiCl4 pre valve closed
7/31/2011	6:26:20 PM	SiCl4 post valve closed
7/31/2011	6:26:20 PM	Bypass valve closed
7/31/2011	6:26:20 PM	Bubbler valve closed
7/31/2011	6:26:20 PM	Helium valve opened
7/31/2011	6:26:20 PM	Main Vac valve opened
7/31/2011	6:26:20 PM	Helium MFC set to  20.000000
7/31/2011	6:26:20 PM	H2 MFC set to  0.000000
7/31/2011	6:26:20 PM	BCl3 MFC set to  0.000000
7/31/2011	6:26:20 PM	PHl3 MFC set to  0.000000
7/31/2011	6:26:20 PM	SiCl4 MFC set to  0.000000
7/31/2011	6:26:20 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	6:26:20 PM	Tube furnace set to 120
7/31/2011	6:26:50 PM	Helium valve closed
7/31/2011	6:26:50 PM	H2 valve closed
7/31/2011	6:26:50 PM	BCl3 valve closed
7/31/2011	6:26:50 PM	PH3 valve closed
7/31/2011	6:26:50 PM	SiCl4 pre valve closed
7/31/2011	6:26:50 PM	SiCl4 post valve closed
7/31/2011	6:26:50 PM	Bypass valve closed
7/31/2011	6:26:50 PM	Bubbler valve closed
7/31/2011	6:26:50 PM	Main Vac valve opened
7/31/2011	6:26:50 PM	Helium MFC set to  0.000000
7/31/2011	6:26:50 PM	H2 MFC set to  0.000000
7/31/2011	6:26:50 PM	BCl3 MFC set to  0.000000
7/31/2011	6:26:50 PM	PHl3 MFC set to  0.000000
7/31/2011	6:26:50 PM	SiCl4 MFC set to  0.000000
7/31/2011	6:26:50 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	6:26:51 PM	Tube furnace set to 120
7/31/2011	6:27:21 PM	H2 valve closed
7/31/2011	6:27:21 PM	BCl3 valve closed
7/31/2011	6:27:21 PM	PH3 valve closed
7/31/2011	6:27:21 PM	SiCl4 pre valve closed
7/31/2011	6:27:21 PM	SiCl4 post valve closed
7/31/2011	6:27:21 PM	Bypass valve closed
7/31/2011	6:27:21 PM	Bubbler valve closed
7/31/2011	6:27:21 PM	Helium valve opened
7/31/2011	6:27:21 PM	Main Vac valve opened
7/31/2011	6:27:21 PM	Helium MFC set to  20.000000
7/31/2011	6:27:21 PM	H2 MFC set to  0.000000
7/31/2011	6:27:21 PM	BCl3 MFC set to  0.000000
7/31/2011	6:27:21 PM	PHl3 MFC set to  0.000000
7/31/2011	6:27:21 PM	SiCl4 MFC set to  0.000000
7/31/2011	6:27:21 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	6:27:21 PM	Tube furnace set to 120
7/31/2011	6:27:51 PM	Helium valve closed
7/31/2011	6:27:51 PM	H2 valve closed
7/31/2011	6:27:51 PM	BCl3 valve closed
7/31/2011	6:27:51 PM	PH3 valve closed
7/31/2011	6:27:51 PM	SiCl4 pre valve closed
7/31/2011	6:27:51 PM	SiCl4 post valve closed
7/31/2011	6:27:51 PM	Bypass valve closed
7/31/2011	6:27:51 PM	Bubbler valve closed
7/31/2011	6:27:51 PM	Main Vac valve opened
7/31/2011	6:27:51 PM	Helium MFC set to  0.000000
7/31/2011	6:27:51 PM	H2 MFC set to  0.000000
7/31/2011	6:27:51 PM	BCl3 MFC set to  0.000000
7/31/2011	6:27:51 PM	PHl3 MFC set to  0.000000
7/31/2011	6:27:51 PM	SiCl4 MFC set to  0.000000
7/31/2011	6:27:51 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	6:27:51 PM	Tube furnace set to 120
7/31/2011	6:28:21 PM	H2 valve closed
7/31/2011	6:28:21 PM	BCl3 valve closed
7/31/2011	6:28:21 PM	PH3 valve closed
7/31/2011	6:28:21 PM	SiCl4 pre valve closed
7/31/2011	6:28:21 PM	SiCl4 post valve closed
7/31/2011	6:28:21 PM	Bypass valve closed
7/31/2011	6:28:21 PM	Bubbler valve closed
7/31/2011	6:28:21 PM	Helium valve opened
7/31/2011	6:28:21 PM	Main Vac valve opened
7/31/2011	6:28:21 PM	Helium MFC set to  20.000000
7/31/2011	6:28:21 PM	H2 MFC set to  0.000000
7/31/2011	6:28:21 PM	BCl3 MFC set to  0.000000
7/31/2011	6:28:21 PM	PHl3 MFC set to  0.000000
7/31/2011	6:28:21 PM	SiCl4 MFC set to  0.000000
7/31/2011	6:28:21 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	6:28:21 PM	Tube furnace set to 120
7/31/2011	6:28:51 PM	Helium valve closed
7/31/2011	6:28:51 PM	H2 valve closed
7/31/2011	6:28:51 PM	BCl3 valve closed
7/31/2011	6:28:51 PM	PH3 valve closed
7/31/2011	6:28:51 PM	SiCl4 pre valve closed
7/31/2011	6:28:51 PM	SiCl4 post valve closed
7/31/2011	6:28:51 PM	Bypass valve closed
7/31/2011	6:28:51 PM	Bubbler valve closed
7/31/2011	6:28:51 PM	Main Vac valve opened
7/31/2011	6:28:51 PM	Helium MFC set to  0.000000
7/31/2011	6:28:51 PM	H2 MFC set to  0.000000
7/31/2011	6:28:51 PM	BCl3 MFC set to  0.000000
7/31/2011	6:28:51 PM	PHl3 MFC set to  0.000000
7/31/2011	6:28:51 PM	SiCl4 MFC set to  0.000000
7/31/2011	6:28:51 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	6:28:51 PM	Tube furnace set to 120
7/31/2011	6:29:21 PM	H2 valve closed
7/31/2011	6:29:21 PM	BCl3 valve closed
7/31/2011	6:29:21 PM	PH3 valve closed
7/31/2011	6:29:21 PM	SiCl4 pre valve closed
7/31/2011	6:29:21 PM	SiCl4 post valve closed
7/31/2011	6:29:21 PM	Bypass valve closed
7/31/2011	6:29:21 PM	Bubbler valve closed
7/31/2011	6:29:21 PM	Helium valve opened
7/31/2011	6:29:21 PM	Main Vac valve opened
7/31/2011	6:29:21 PM	Helium MFC set to  20.000000
7/31/2011	6:29:21 PM	H2 MFC set to  0.000000
7/31/2011	6:29:21 PM	BCl3 MFC set to  0.000000
7/31/2011	6:29:21 PM	PHl3 MFC set to  0.000000
7/31/2011	6:29:21 PM	SiCl4 MFC set to  0.000000
7/31/2011	6:29:21 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	6:29:22 PM	Tube furnace set to 120
7/31/2011	6:29:52 PM	Helium valve closed
7/31/2011	6:29:52 PM	H2 valve closed
7/31/2011	6:29:52 PM	BCl3 valve closed
7/31/2011	6:29:52 PM	PH3 valve closed
7/31/2011	6:29:52 PM	SiCl4 pre valve closed
7/31/2011	6:29:52 PM	SiCl4 post valve closed
7/31/2011	6:29:52 PM	Bypass valve closed
7/31/2011	6:29:52 PM	Bubbler valve closed
7/31/2011	6:29:52 PM	Main Vac valve opened
7/31/2011	6:29:52 PM	Helium MFC set to  0.000000
7/31/2011	6:29:52 PM	H2 MFC set to  0.000000
7/31/2011	6:29:52 PM	BCl3 MFC set to  0.000000
7/31/2011	6:29:52 PM	PHl3 MFC set to  0.000000
7/31/2011	6:29:52 PM	SiCl4 MFC set to  0.000000
7/31/2011	6:29:52 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	6:29:52 PM	Tube furnace set to 120
7/31/2011	6:30:22 PM	H2 valve closed
7/31/2011	6:30:22 PM	BCl3 valve closed
7/31/2011	6:30:22 PM	PH3 valve closed
7/31/2011	6:30:22 PM	SiCl4 pre valve closed
7/31/2011	6:30:22 PM	SiCl4 post valve closed
7/31/2011	6:30:22 PM	Bypass valve closed
7/31/2011	6:30:22 PM	Bubbler valve closed
7/31/2011	6:30:22 PM	Helium valve opened
7/31/2011	6:30:22 PM	Main Vac valve opened
7/31/2011	6:30:22 PM	Helium MFC set to  20.000000
7/31/2011	6:30:22 PM	H2 MFC set to  0.000000
7/31/2011	6:30:22 PM	BCl3 MFC set to  0.000000
7/31/2011	6:30:22 PM	PHl3 MFC set to  0.000000
7/31/2011	6:30:22 PM	SiCl4 MFC set to  0.000000
7/31/2011	6:30:22 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	6:30:22 PM	Tube furnace set to 120
7/31/2011	6:30:52 PM	Helium valve closed
7/31/2011	6:30:52 PM	H2 valve closed
7/31/2011	6:30:52 PM	BCl3 valve closed
7/31/2011	6:30:52 PM	PH3 valve closed
7/31/2011	6:30:52 PM	SiCl4 pre valve closed
7/31/2011	6:30:52 PM	SiCl4 post valve closed
7/31/2011	6:30:52 PM	Bypass valve closed
7/31/2011	6:30:52 PM	Bubbler valve closed
7/31/2011	6:30:52 PM	Main Vac valve opened
7/31/2011	6:30:52 PM	Helium MFC set to  0.000000
7/31/2011	6:30:52 PM	H2 MFC set to  0.000000
7/31/2011	6:30:52 PM	BCl3 MFC set to  0.000000
7/31/2011	6:30:52 PM	PHl3 MFC set to  0.000000
7/31/2011	6:30:52 PM	SiCl4 MFC set to  0.000000
7/31/2011	6:30:52 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	6:30:52 PM	Tube furnace set to 120
7/31/2011	6:31:22 PM	H2 valve closed
7/31/2011	6:31:22 PM	BCl3 valve closed
7/31/2011	6:31:22 PM	PH3 valve closed
7/31/2011	6:31:22 PM	SiCl4 pre valve closed
7/31/2011	6:31:22 PM	SiCl4 post valve closed
7/31/2011	6:31:22 PM	Bypass valve closed
7/31/2011	6:31:22 PM	Bubbler valve closed
7/31/2011	6:31:22 PM	Helium valve opened
7/31/2011	6:31:22 PM	Main Vac valve opened
7/31/2011	6:31:22 PM	Helium MFC set to  20.000000
7/31/2011	6:31:22 PM	H2 MFC set to  0.000000
7/31/2011	6:31:22 PM	BCl3 MFC set to  0.000000
7/31/2011	6:31:22 PM	PHl3 MFC set to  0.000000
7/31/2011	6:31:22 PM	SiCl4 MFC set to  0.000000
7/31/2011	6:31:22 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	6:31:22 PM	Tube furnace set to 120
7/31/2011	6:31:52 PM	Helium valve closed
7/31/2011	6:31:52 PM	H2 valve closed
7/31/2011	6:31:52 PM	BCl3 valve closed
7/31/2011	6:31:52 PM	PH3 valve closed
7/31/2011	6:31:52 PM	SiCl4 pre valve closed
7/31/2011	6:31:52 PM	SiCl4 post valve closed
7/31/2011	6:31:52 PM	Bypass valve closed
7/31/2011	6:31:52 PM	Bubbler valve closed
7/31/2011	6:31:52 PM	Main Vac valve opened
7/31/2011	6:31:52 PM	Helium MFC set to  0.000000
7/31/2011	6:31:52 PM	H2 MFC set to  0.000000
7/31/2011	6:31:52 PM	BCl3 MFC set to  0.000000
7/31/2011	6:31:52 PM	PHl3 MFC set to  0.000000
7/31/2011	6:31:52 PM	SiCl4 MFC set to  0.000000
7/31/2011	6:31:52 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	6:31:53 PM	Tube furnace set to 120
7/31/2011	6:31:54 PM	Run finished at 6:31 PM
7/31/2011	8:15:53 PM	Main Vac valve closed
7/31/2011	8:16:06 PM	Main Vac valve opened
7/31/2011	8:16:29 PM	Recipe started at 8:16 PM
7/31/2011	8:16:29 PM	Helium valve closed
7/31/2011	8:16:29 PM	BCl3 valve closed
7/31/2011	8:16:29 PM	PH3 valve closed
7/31/2011	8:16:29 PM	SiCl4 pre valve closed
7/31/2011	8:16:29 PM	SiCl4 post valve closed
7/31/2011	8:16:29 PM	Main Vac valve closed
7/31/2011	8:16:29 PM	Bypass valve closed
7/31/2011	8:16:29 PM	Bubbler valve closed
7/31/2011	8:16:29 PM	H2 valve opened
7/31/2011	8:16:29 PM	Helium MFC set to  0.000000
7/31/2011	8:16:29 PM	H2 MFC set to  500.000000
7/31/2011	8:16:29 PM	BCl3 MFC set to  0.000000
7/31/2011	8:16:29 PM	PHl3 MFC set to  0.000000
7/31/2011	8:16:29 PM	SiCl4 MFC set to  0.000000
7/31/2011	8:16:29 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	8:16:29 PM	Tube furnace set to 0
7/31/2011	8:17:34 PM	Helium valve closed
7/31/2011	8:17:34 PM	BCl3 valve closed
7/31/2011	8:17:34 PM	PH3 valve closed
7/31/2011	8:17:34 PM	SiCl4 pre valve closed
7/31/2011	8:17:34 PM	SiCl4 post valve closed
7/31/2011	8:17:34 PM	Main Vac valve closed
7/31/2011	8:17:34 PM	Bypass valve closed
7/31/2011	8:17:34 PM	H2 valve opened
7/31/2011	8:17:34 PM	Bubbler valve opened
7/31/2011	8:17:34 PM	Helium MFC set to  0.000000
7/31/2011	8:17:34 PM	H2 MFC set to  500.000000
7/31/2011	8:17:34 PM	BCl3 MFC set to  0.000000
7/31/2011	8:17:34 PM	PHl3 MFC set to  0.000000
7/31/2011	8:17:34 PM	SiCl4 MFC set to  0.000000
7/31/2011	8:17:34 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	8:17:34 PM	Tube furnace set to 1010
7/31/2011	8:35:54 PM	Helium valve closed
7/31/2011	8:35:54 PM	PH3 valve closed
7/31/2011	8:35:54 PM	Main Vac valve closed
7/31/2011	8:35:54 PM	Bypass valve closed
7/31/2011	8:35:54 PM	H2 valve opened
7/31/2011	8:35:54 PM	BCl3 valve opened
7/31/2011	8:35:54 PM	SiCl4 pre valve opened
7/31/2011	8:35:54 PM	SiCl4 post valve opened
7/31/2011	8:35:54 PM	Bubbler valve opened
7/31/2011	8:35:54 PM	Helium MFC set to  0.000000
7/31/2011	8:35:54 PM	H2 MFC set to  500.000000
7/31/2011	8:35:54 PM	BCl3 MFC set to  2.000000
7/31/2011	8:35:54 PM	PHl3 MFC set to  0.000000
7/31/2011	8:35:54 PM	SiCl4 MFC set to  50.000000
7/31/2011	8:35:54 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	8:35:54 PM	Tube furnace set to 1010
7/31/2011	8:51:54 PM	Helium valve closed
7/31/2011	8:51:54 PM	BCl3 valve closed
7/31/2011	8:51:54 PM	PH3 valve closed
7/31/2011	8:51:54 PM	SiCl4 pre valve closed
7/31/2011	8:51:54 PM	SiCl4 post valve closed
7/31/2011	8:51:54 PM	Main Vac valve closed
7/31/2011	8:51:54 PM	Bypass valve closed
7/31/2011	8:51:54 PM	H2 valve opened
7/31/2011	8:51:54 PM	Bubbler valve opened
7/31/2011	8:51:54 PM	Helium MFC set to  0.000000
7/31/2011	8:51:54 PM	H2 MFC set to  500.000000
7/31/2011	8:51:54 PM	BCl3 MFC set to  0.000000
7/31/2011	8:51:54 PM	PHl3 MFC set to  0.000000
7/31/2011	8:51:54 PM	SiCl4 MFC set to  0.000000
7/31/2011	8:51:54 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	8:51:54 PM	Tube furnace set to 975
7/31/2011	8:52:54 PM	Helium valve closed
7/31/2011	8:52:54 PM	BCl3 valve closed
7/31/2011	8:52:54 PM	PH3 valve closed
7/31/2011	8:52:54 PM	SiCl4 pre valve closed
7/31/2011	8:52:54 PM	SiCl4 post valve closed
7/31/2011	8:52:54 PM	Main Vac valve closed
7/31/2011	8:52:54 PM	Bypass valve closed
7/31/2011	8:52:54 PM	H2 valve opened
7/31/2011	8:52:54 PM	Bubbler valve opened
7/31/2011	8:52:54 PM	Helium MFC set to  0.000000
7/31/2011	8:52:54 PM	H2 MFC set to  500.000000
7/31/2011	8:52:54 PM	BCl3 MFC set to  0.000000
7/31/2011	8:52:54 PM	PHl3 MFC set to  0.000000
7/31/2011	8:52:54 PM	SiCl4 MFC set to  0.000000
7/31/2011	8:52:54 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	8:52:55 PM	Tube furnace set to 950
7/31/2011	8:53:55 PM	Helium valve closed
7/31/2011	8:53:55 PM	BCl3 valve closed
7/31/2011	8:53:55 PM	PH3 valve closed
7/31/2011	8:53:55 PM	SiCl4 pre valve closed
7/31/2011	8:53:55 PM	SiCl4 post valve closed
7/31/2011	8:53:55 PM	Main Vac valve closed
7/31/2011	8:53:55 PM	Bypass valve closed
7/31/2011	8:53:55 PM	H2 valve opened
7/31/2011	8:53:55 PM	Bubbler valve opened
7/31/2011	8:53:55 PM	Helium MFC set to  0.000000
7/31/2011	8:53:55 PM	H2 MFC set to  500.000000
7/31/2011	8:53:55 PM	BCl3 MFC set to  0.000000
7/31/2011	8:53:55 PM	PHl3 MFC set to  0.000000
7/31/2011	8:53:55 PM	SiCl4 MFC set to  0.000000
7/31/2011	8:53:55 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	8:53:55 PM	Tube furnace set to 925
7/31/2011	8:54:55 PM	Helium valve closed
7/31/2011	8:54:55 PM	BCl3 valve closed
7/31/2011	8:54:55 PM	PH3 valve closed
7/31/2011	8:54:55 PM	SiCl4 pre valve closed
7/31/2011	8:54:55 PM	SiCl4 post valve closed
7/31/2011	8:54:55 PM	Main Vac valve closed
7/31/2011	8:54:55 PM	Bypass valve closed
7/31/2011	8:54:55 PM	H2 valve opened
7/31/2011	8:54:55 PM	Bubbler valve opened
7/31/2011	8:54:55 PM	Helium MFC set to  0.000000
7/31/2011	8:54:55 PM	H2 MFC set to  500.000000
7/31/2011	8:54:55 PM	BCl3 MFC set to  0.000000
7/31/2011	8:54:55 PM	PHl3 MFC set to  0.000000
7/31/2011	8:54:55 PM	SiCl4 MFC set to  0.000000
7/31/2011	8:54:55 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	8:54:55 PM	Tube furnace set to 900
7/31/2011	8:55:55 PM	Helium valve closed
7/31/2011	8:55:55 PM	BCl3 valve closed
7/31/2011	8:55:55 PM	PH3 valve closed
7/31/2011	8:55:55 PM	SiCl4 pre valve closed
7/31/2011	8:55:55 PM	SiCl4 post valve closed
7/31/2011	8:55:55 PM	Main Vac valve closed
7/31/2011	8:55:55 PM	Bypass valve closed
7/31/2011	8:55:55 PM	H2 valve opened
7/31/2011	8:55:55 PM	Bubbler valve opened
7/31/2011	8:55:55 PM	Helium MFC set to  0.000000
7/31/2011	8:55:55 PM	H2 MFC set to  500.000000
7/31/2011	8:55:55 PM	BCl3 MFC set to  0.000000
7/31/2011	8:55:55 PM	PHl3 MFC set to  0.000000
7/31/2011	8:55:55 PM	SiCl4 MFC set to  0.000000
7/31/2011	8:55:55 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	8:55:55 PM	Tube furnace set to 850
7/31/2011	8:57:25 PM	Helium valve closed
7/31/2011	8:57:25 PM	BCl3 valve closed
7/31/2011	8:57:25 PM	PH3 valve closed
7/31/2011	8:57:25 PM	SiCl4 pre valve closed
7/31/2011	8:57:25 PM	SiCl4 post valve closed
7/31/2011	8:57:25 PM	Main Vac valve closed
7/31/2011	8:57:25 PM	Bypass valve closed
7/31/2011	8:57:25 PM	H2 valve opened
7/31/2011	8:57:25 PM	Bubbler valve opened
7/31/2011	8:57:25 PM	Helium MFC set to  0.000000
7/31/2011	8:57:25 PM	H2 MFC set to  500.000000
7/31/2011	8:57:25 PM	BCl3 MFC set to  0.000000
7/31/2011	8:57:25 PM	PHl3 MFC set to  0.000000
7/31/2011	8:57:25 PM	SiCl4 MFC set to  0.000000
7/31/2011	8:57:25 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	8:57:25 PM	Tube furnace set to 800
7/31/2011	8:58:55 PM	H2 valve closed
7/31/2011	8:58:55 PM	BCl3 valve closed
7/31/2011	8:58:55 PM	PH3 valve closed
7/31/2011	8:58:55 PM	SiCl4 pre valve closed
7/31/2011	8:58:55 PM	SiCl4 post valve closed
7/31/2011	8:58:55 PM	Main Vac valve closed
7/31/2011	8:58:55 PM	Bypass valve closed
7/31/2011	8:58:55 PM	Helium valve opened
7/31/2011	8:58:55 PM	Bubbler valve opened
7/31/2011	8:58:55 PM	Helium MFC set to  500.000000
7/31/2011	8:58:55 PM	H2 MFC set to  0.000000
7/31/2011	8:58:55 PM	BCl3 MFC set to  0.000000
7/31/2011	8:58:55 PM	PHl3 MFC set to  0.000000
7/31/2011	8:58:55 PM	SiCl4 MFC set to  0.000000
7/31/2011	8:58:55 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	8:58:56 PM	Tube furnace set to 0
7/31/2011	9:18:55 PM	Helium valve closed
7/31/2011	9:18:55 PM	H2 valve closed
7/31/2011	9:18:55 PM	BCl3 valve closed
7/31/2011	9:18:55 PM	PH3 valve closed
7/31/2011	9:18:55 PM	SiCl4 pre valve closed
7/31/2011	9:18:55 PM	SiCl4 post valve closed
7/31/2011	9:18:55 PM	Main Vac valve closed
7/31/2011	9:18:56 PM	Bypass valve closed
7/31/2011	9:18:56 PM	Bubbler valve closed
7/31/2011	9:18:56 PM	Helium MFC set to  0.000000
7/31/2011	9:18:56 PM	H2 MFC set to  0.000000
7/31/2011	9:18:56 PM	BCl3 MFC set to  0.000000
7/31/2011	9:18:56 PM	PHl3 MFC set to  0.000000
7/31/2011	9:18:56 PM	SiCl4 MFC set to  0.000000
7/31/2011	9:18:56 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	9:18:56 PM	Tube furnace set to 0
7/31/2011	10:18:56 PM	Run finished at 10:18 PM
7/31/2011	10:32:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/31/2011	10:32:10 PM	Recipe started at 10:32 PM
7/31/2011	10:32:10 PM	Helium valve closed
7/31/2011	10:32:10 PM	H2 valve closed
7/31/2011	10:32:10 PM	BCl3 valve closed
7/31/2011	10:32:10 PM	PH3 valve closed
7/31/2011	10:32:10 PM	SiCl4 pre valve closed
7/31/2011	10:32:10 PM	SiCl4 post valve closed
7/31/2011	10:32:10 PM	Main Vac valve closed
7/31/2011	10:32:10 PM	Bypass valve closed
7/31/2011	10:32:10 PM	Bubbler valve closed
7/31/2011	10:32:10 PM	Helium MFC set to  0.000000
7/31/2011	10:32:10 PM	H2 MFC set to  0.000000
7/31/2011	10:32:10 PM	BCl3 MFC set to  0.000000
7/31/2011	10:32:10 PM	PHl3 MFC set to  0.000000
7/31/2011	10:32:10 PM	SiCl4 MFC set to  0.000000
7/31/2011	10:32:10 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	10:32:10 PM	Tube furnace set to 0
7/31/2011	10:32:14 PM	H2 valve closed
7/31/2011	10:32:14 PM	BCl3 valve closed
7/31/2011	10:32:14 PM	PH3 valve closed
7/31/2011	10:32:14 PM	SiCl4 pre valve closed
7/31/2011	10:32:14 PM	SiCl4 post valve closed
7/31/2011	10:32:14 PM	Main Vac valve closed
7/31/2011	10:32:14 PM	Bypass valve closed
7/31/2011	10:32:14 PM	Bubbler valve closed
7/31/2011	10:32:14 PM	Helium valve opened
7/31/2011	10:32:14 PM	Helium MFC set to  500.000000
7/31/2011	10:32:14 PM	H2 MFC set to  0.000000
7/31/2011	10:32:14 PM	BCl3 MFC set to  0.000000
7/31/2011	10:32:14 PM	PHl3 MFC set to  0.000000
7/31/2011	10:32:14 PM	SiCl4 MFC set to  0.000000
7/31/2011	10:32:14 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	10:32:14 PM	Tube furnace set to 0
7/31/2011	10:32:18 PM	Helium valve closed
7/31/2011	10:32:18 PM	H2 valve closed
7/31/2011	10:32:18 PM	BCl3 valve closed
7/31/2011	10:32:18 PM	PH3 valve closed
7/31/2011	10:32:18 PM	SiCl4 pre valve closed
7/31/2011	10:32:18 PM	SiCl4 post valve closed
7/31/2011	10:32:18 PM	Main Vac valve closed
7/31/2011	10:32:18 PM	Bypass valve closed
7/31/2011	10:32:18 PM	Bubbler valve closed
7/31/2011	10:32:18 PM	Helium MFC set to  0.000000
7/31/2011	10:32:18 PM	H2 MFC set to  0.000000
7/31/2011	10:32:18 PM	BCl3 MFC set to  0.000000
7/31/2011	10:32:18 PM	PHl3 MFC set to  0.000000
7/31/2011	10:32:18 PM	SiCl4 MFC set to  0.000000
7/31/2011	10:32:18 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	10:32:18 PM	Tube furnace set to 0
7/31/2011	10:32:19 PM	Run finished at 10:32 PM
7/31/2011	10:32:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/31/2011	10:36:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/31/2011	10:36:21 PM	Recipe started at 10:36 PM
7/31/2011	10:36:21 PM	Helium valve closed
7/31/2011	10:36:21 PM	H2 valve closed
7/31/2011	10:36:21 PM	BCl3 valve closed
7/31/2011	10:36:21 PM	PH3 valve closed
7/31/2011	10:36:21 PM	SiCl4 pre valve closed
7/31/2011	10:36:21 PM	SiCl4 post valve closed
7/31/2011	10:36:21 PM	Main Vac valve closed
7/31/2011	10:36:21 PM	Bubbler valve closed
7/31/2011	10:36:21 PM	Bypass valve opened
7/31/2011	10:36:21 PM	Helium MFC set to  0.000000
7/31/2011	10:36:21 PM	H2 MFC set to  0.000000
7/31/2011	10:36:21 PM	BCl3 MFC set to  0.000000
7/31/2011	10:36:21 PM	PHl3 MFC set to  0.000000
7/31/2011	10:36:21 PM	SiCl4 MFC set to  0.000000
7/31/2011	10:36:21 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	10:36:21 PM	Tube furnace set to 0
7/31/2011	10:37:27 PM	Helium valve closed
7/31/2011	10:37:27 PM	H2 valve closed
7/31/2011	10:37:27 PM	BCl3 valve closed
7/31/2011	10:37:27 PM	PH3 valve closed
7/31/2011	10:37:27 PM	SiCl4 pre valve closed
7/31/2011	10:37:27 PM	SiCl4 post valve closed
7/31/2011	10:37:27 PM	Main Vac valve closed
7/31/2011	10:37:27 PM	Bubbler valve closed
7/31/2011	10:37:27 PM	Bypass valve opened
7/31/2011	10:37:27 PM	Helium MFC set to  0.000000
7/31/2011	10:37:27 PM	H2 MFC set to  0.000000
7/31/2011	10:37:27 PM	BCl3 MFC set to  0.000000
7/31/2011	10:37:27 PM	PHl3 MFC set to  0.000000
7/31/2011	10:37:27 PM	SiCl4 MFC set to  0.000000
7/31/2011	10:37:27 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	10:37:27 PM	Tube furnace set to 0
7/31/2011	10:38:27 PM	Helium valve closed
7/31/2011	10:38:27 PM	H2 valve closed
7/31/2011	10:38:27 PM	BCl3 valve closed
7/31/2011	10:38:27 PM	PH3 valve closed
7/31/2011	10:38:27 PM	SiCl4 pre valve closed
7/31/2011	10:38:27 PM	SiCl4 post valve closed
7/31/2011	10:38:27 PM	Bypass valve closed
7/31/2011	10:38:27 PM	Bubbler valve closed
7/31/2011	10:38:27 PM	Main Vac valve opened
7/31/2011	10:38:27 PM	Helium MFC set to  0.000000
7/31/2011	10:38:27 PM	H2 MFC set to  0.000000
7/31/2011	10:38:27 PM	BCl3 MFC set to  0.000000
7/31/2011	10:38:27 PM	PHl3 MFC set to  0.000000
7/31/2011	10:38:27 PM	SiCl4 MFC set to  0.000000
7/31/2011	10:38:27 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	10:38:27 PM	Tube furnace set to 0
7/31/2011	10:38:28 PM	Run finished at 10:38 PM
7/31/2011	10:38:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/31/2011	10:43:41 PM	Recipe started at 10:43 PM
7/31/2011	10:43:41 PM	Helium valve closed
7/31/2011	10:43:41 PM	H2 valve closed
7/31/2011	10:43:41 PM	BCl3 valve closed
7/31/2011	10:43:41 PM	PH3 valve closed
7/31/2011	10:43:41 PM	SiCl4 pre valve closed
7/31/2011	10:43:41 PM	SiCl4 post valve closed
7/31/2011	10:43:41 PM	Bypass valve closed
7/31/2011	10:43:41 PM	Bubbler valve closed
7/31/2011	10:43:41 PM	Main Vac valve opened
7/31/2011	10:43:41 PM	Helium MFC set to  0.000000
7/31/2011	10:43:41 PM	H2 MFC set to  0.000000
7/31/2011	10:43:41 PM	BCl3 MFC set to  0.000000
7/31/2011	10:43:41 PM	PHl3 MFC set to  0.000000
7/31/2011	10:43:41 PM	SiCl4 MFC set to  0.000000
7/31/2011	10:43:41 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	10:43:41 PM	Tube furnace set to 0
7/31/2011	10:53:41 PM	H2 valve closed
7/31/2011	10:53:41 PM	BCl3 valve closed
7/31/2011	10:53:41 PM	PH3 valve closed
7/31/2011	10:53:41 PM	SiCl4 pre valve closed
7/31/2011	10:53:41 PM	SiCl4 post valve closed
7/31/2011	10:53:41 PM	Bypass valve closed
7/31/2011	10:53:41 PM	Bubbler valve closed
7/31/2011	10:53:41 PM	Helium valve opened
7/31/2011	10:53:41 PM	Main Vac valve opened
7/31/2011	10:53:41 PM	Helium MFC set to  20.000000
7/31/2011	10:53:41 PM	H2 MFC set to  0.000000
7/31/2011	10:53:41 PM	BCl3 MFC set to  0.000000
7/31/2011	10:53:41 PM	PHl3 MFC set to  0.000000
7/31/2011	10:53:41 PM	SiCl4 MFC set to  0.000000
7/31/2011	10:53:41 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	10:53:41 PM	Tube furnace set to 0
7/31/2011	10:54:11 PM	Helium valve closed
7/31/2011	10:54:11 PM	H2 valve closed
7/31/2011	10:54:11 PM	BCl3 valve closed
7/31/2011	10:54:11 PM	PH3 valve closed
7/31/2011	10:54:11 PM	SiCl4 pre valve closed
7/31/2011	10:54:11 PM	SiCl4 post valve closed
7/31/2011	10:54:11 PM	Bypass valve closed
7/31/2011	10:54:11 PM	Bubbler valve closed
7/31/2011	10:54:11 PM	Main Vac valve opened
7/31/2011	10:54:11 PM	Helium MFC set to  0.000000
7/31/2011	10:54:11 PM	H2 MFC set to  0.000000
7/31/2011	10:54:11 PM	BCl3 MFC set to  0.000000
7/31/2011	10:54:11 PM	PHl3 MFC set to  0.000000
7/31/2011	10:54:11 PM	SiCl4 MFC set to  0.000000
7/31/2011	10:54:11 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	10:54:11 PM	Tube furnace set to 0
7/31/2011	10:54:41 PM	H2 valve closed
7/31/2011	10:54:41 PM	BCl3 valve closed
7/31/2011	10:54:41 PM	PH3 valve closed
7/31/2011	10:54:41 PM	SiCl4 pre valve closed
7/31/2011	10:54:41 PM	SiCl4 post valve closed
7/31/2011	10:54:41 PM	Bypass valve closed
7/31/2011	10:54:41 PM	Bubbler valve closed
7/31/2011	10:54:41 PM	Helium valve opened
7/31/2011	10:54:41 PM	Main Vac valve opened
7/31/2011	10:54:41 PM	Helium MFC set to  20.000000
7/31/2011	10:54:41 PM	H2 MFC set to  0.000000
7/31/2011	10:54:41 PM	BCl3 MFC set to  0.000000
7/31/2011	10:54:41 PM	PHl3 MFC set to  0.000000
7/31/2011	10:54:41 PM	SiCl4 MFC set to  0.000000
7/31/2011	10:54:41 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	10:54:41 PM	Tube furnace set to 0
7/31/2011	10:55:11 PM	Helium valve closed
7/31/2011	10:55:11 PM	H2 valve closed
7/31/2011	10:55:11 PM	BCl3 valve closed
7/31/2011	10:55:11 PM	PH3 valve closed
7/31/2011	10:55:11 PM	SiCl4 pre valve closed
7/31/2011	10:55:11 PM	SiCl4 post valve closed
7/31/2011	10:55:11 PM	Bypass valve closed
7/31/2011	10:55:11 PM	Bubbler valve closed
7/31/2011	10:55:11 PM	Main Vac valve opened
7/31/2011	10:55:11 PM	Helium MFC set to  0.000000
7/31/2011	10:55:11 PM	H2 MFC set to  0.000000
7/31/2011	10:55:11 PM	BCl3 MFC set to  0.000000
7/31/2011	10:55:11 PM	PHl3 MFC set to  0.000000
7/31/2011	10:55:11 PM	SiCl4 MFC set to  0.000000
7/31/2011	10:55:11 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	10:55:12 PM	Tube furnace set to 0
7/31/2011	10:55:42 PM	H2 valve closed
7/31/2011	10:55:42 PM	BCl3 valve closed
7/31/2011	10:55:42 PM	PH3 valve closed
7/31/2011	10:55:42 PM	SiCl4 pre valve closed
7/31/2011	10:55:42 PM	SiCl4 post valve closed
7/31/2011	10:55:42 PM	Bypass valve closed
7/31/2011	10:55:42 PM	Bubbler valve closed
7/31/2011	10:55:42 PM	Helium valve opened
7/31/2011	10:55:42 PM	Main Vac valve opened
7/31/2011	10:55:42 PM	Helium MFC set to  20.000000
7/31/2011	10:55:42 PM	H2 MFC set to  0.000000
7/31/2011	10:55:42 PM	BCl3 MFC set to  0.000000
7/31/2011	10:55:42 PM	PHl3 MFC set to  0.000000
7/31/2011	10:55:42 PM	SiCl4 MFC set to  0.000000
7/31/2011	10:55:42 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	10:55:42 PM	Tube furnace set to 0
7/31/2011	10:56:12 PM	Helium valve closed
7/31/2011	10:56:12 PM	H2 valve closed
7/31/2011	10:56:12 PM	BCl3 valve closed
7/31/2011	10:56:12 PM	PH3 valve closed
7/31/2011	10:56:12 PM	SiCl4 pre valve closed
7/31/2011	10:56:12 PM	SiCl4 post valve closed
7/31/2011	10:56:12 PM	Bypass valve closed
7/31/2011	10:56:12 PM	Bubbler valve closed
7/31/2011	10:56:12 PM	Main Vac valve opened
7/31/2011	10:56:12 PM	Helium MFC set to  0.000000
7/31/2011	10:56:12 PM	H2 MFC set to  0.000000
7/31/2011	10:56:12 PM	BCl3 MFC set to  0.000000
7/31/2011	10:56:12 PM	PHl3 MFC set to  0.000000
7/31/2011	10:56:12 PM	SiCl4 MFC set to  0.000000
7/31/2011	10:56:12 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	10:56:12 PM	Tube furnace set to 0
7/31/2011	10:56:42 PM	H2 valve closed
7/31/2011	10:56:42 PM	BCl3 valve closed
7/31/2011	10:56:42 PM	PH3 valve closed
7/31/2011	10:56:42 PM	SiCl4 pre valve closed
7/31/2011	10:56:42 PM	SiCl4 post valve closed
7/31/2011	10:56:42 PM	Bypass valve closed
7/31/2011	10:56:42 PM	Bubbler valve closed
7/31/2011	10:56:42 PM	Helium valve opened
7/31/2011	10:56:42 PM	Main Vac valve opened
7/31/2011	10:56:42 PM	Helium MFC set to  20.000000
7/31/2011	10:56:42 PM	H2 MFC set to  0.000000
7/31/2011	10:56:42 PM	BCl3 MFC set to  0.000000
7/31/2011	10:56:42 PM	PHl3 MFC set to  0.000000
7/31/2011	10:56:42 PM	SiCl4 MFC set to  0.000000
7/31/2011	10:56:42 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	10:56:42 PM	Tube furnace set to 0
7/31/2011	10:57:12 PM	Helium valve closed
7/31/2011	10:57:12 PM	H2 valve closed
7/31/2011	10:57:12 PM	BCl3 valve closed
7/31/2011	10:57:12 PM	PH3 valve closed
7/31/2011	10:57:12 PM	SiCl4 pre valve closed
7/31/2011	10:57:12 PM	SiCl4 post valve closed
7/31/2011	10:57:12 PM	Bypass valve closed
7/31/2011	10:57:12 PM	Bubbler valve closed
7/31/2011	10:57:12 PM	Main Vac valve opened
7/31/2011	10:57:12 PM	Helium MFC set to  0.000000
7/31/2011	10:57:12 PM	H2 MFC set to  0.000000
7/31/2011	10:57:12 PM	BCl3 MFC set to  0.000000
7/31/2011	10:57:12 PM	PHl3 MFC set to  0.000000
7/31/2011	10:57:12 PM	SiCl4 MFC set to  0.000000
7/31/2011	10:57:12 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	10:57:12 PM	Tube furnace set to 0
7/31/2011	10:57:42 PM	H2 valve closed
7/31/2011	10:57:42 PM	BCl3 valve closed
7/31/2011	10:57:42 PM	PH3 valve closed
7/31/2011	10:57:42 PM	SiCl4 pre valve closed
7/31/2011	10:57:42 PM	SiCl4 post valve closed
7/31/2011	10:57:42 PM	Bypass valve closed
7/31/2011	10:57:42 PM	Bubbler valve closed
7/31/2011	10:57:42 PM	Helium valve opened
7/31/2011	10:57:42 PM	Main Vac valve opened
7/31/2011	10:57:42 PM	Helium MFC set to  20.000000
7/31/2011	10:57:42 PM	H2 MFC set to  0.000000
7/31/2011	10:57:42 PM	BCl3 MFC set to  0.000000
7/31/2011	10:57:42 PM	PHl3 MFC set to  0.000000
7/31/2011	10:57:42 PM	SiCl4 MFC set to  0.000000
7/31/2011	10:57:42 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	10:57:43 PM	Tube furnace set to 120
7/31/2011	10:58:13 PM	Helium valve closed
7/31/2011	10:58:13 PM	H2 valve closed
7/31/2011	10:58:13 PM	BCl3 valve closed
7/31/2011	10:58:13 PM	PH3 valve closed
7/31/2011	10:58:13 PM	SiCl4 pre valve closed
7/31/2011	10:58:13 PM	SiCl4 post valve closed
7/31/2011	10:58:13 PM	Bypass valve closed
7/31/2011	10:58:13 PM	Bubbler valve closed
7/31/2011	10:58:13 PM	Main Vac valve opened
7/31/2011	10:58:13 PM	Helium MFC set to  0.000000
7/31/2011	10:58:13 PM	H2 MFC set to  0.000000
7/31/2011	10:58:13 PM	BCl3 MFC set to  0.000000
7/31/2011	10:58:13 PM	PHl3 MFC set to  0.000000
7/31/2011	10:58:13 PM	SiCl4 MFC set to  0.000000
7/31/2011	10:58:13 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	10:58:13 PM	Tube furnace set to 120
7/31/2011	10:58:43 PM	H2 valve closed
7/31/2011	10:58:43 PM	BCl3 valve closed
7/31/2011	10:58:43 PM	PH3 valve closed
7/31/2011	10:58:43 PM	SiCl4 pre valve closed
7/31/2011	10:58:43 PM	SiCl4 post valve closed
7/31/2011	10:58:43 PM	Bypass valve closed
7/31/2011	10:58:43 PM	Bubbler valve closed
7/31/2011	10:58:43 PM	Helium valve opened
7/31/2011	10:58:43 PM	Main Vac valve opened
7/31/2011	10:58:43 PM	Helium MFC set to  20.000000
7/31/2011	10:58:43 PM	H2 MFC set to  0.000000
7/31/2011	10:58:43 PM	BCl3 MFC set to  0.000000
7/31/2011	10:58:43 PM	PHl3 MFC set to  0.000000
7/31/2011	10:58:43 PM	SiCl4 MFC set to  0.000000
7/31/2011	10:58:43 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	10:58:43 PM	Tube furnace set to 120
7/31/2011	10:59:13 PM	Helium valve closed
7/31/2011	10:59:13 PM	H2 valve closed
7/31/2011	10:59:13 PM	BCl3 valve closed
7/31/2011	10:59:13 PM	PH3 valve closed
7/31/2011	10:59:13 PM	SiCl4 pre valve closed
7/31/2011	10:59:13 PM	SiCl4 post valve closed
7/31/2011	10:59:13 PM	Bypass valve closed
7/31/2011	10:59:13 PM	Bubbler valve closed
7/31/2011	10:59:13 PM	Main Vac valve opened
7/31/2011	10:59:13 PM	Helium MFC set to  0.000000
7/31/2011	10:59:13 PM	H2 MFC set to  0.000000
7/31/2011	10:59:13 PM	BCl3 MFC set to  0.000000
7/31/2011	10:59:13 PM	PHl3 MFC set to  0.000000
7/31/2011	10:59:13 PM	SiCl4 MFC set to  0.000000
7/31/2011	10:59:13 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	10:59:13 PM	Tube furnace set to 120
7/31/2011	10:59:43 PM	H2 valve closed
7/31/2011	10:59:43 PM	BCl3 valve closed
7/31/2011	10:59:43 PM	PH3 valve closed
7/31/2011	10:59:43 PM	SiCl4 pre valve closed
7/31/2011	10:59:43 PM	SiCl4 post valve closed
7/31/2011	10:59:43 PM	Bypass valve closed
7/31/2011	10:59:43 PM	Bubbler valve closed
7/31/2011	10:59:43 PM	Helium valve opened
7/31/2011	10:59:43 PM	Main Vac valve opened
7/31/2011	10:59:43 PM	Helium MFC set to  20.000000
7/31/2011	10:59:43 PM	H2 MFC set to  0.000000
7/31/2011	10:59:43 PM	BCl3 MFC set to  0.000000
7/31/2011	10:59:43 PM	PHl3 MFC set to  0.000000
7/31/2011	10:59:43 PM	SiCl4 MFC set to  0.000000
7/31/2011	10:59:43 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	10:59:43 PM	Tube furnace set to 120
7/31/2011	11:00:13 PM	Helium valve closed
7/31/2011	11:00:13 PM	H2 valve closed
7/31/2011	11:00:13 PM	BCl3 valve closed
7/31/2011	11:00:13 PM	PH3 valve closed
7/31/2011	11:00:13 PM	SiCl4 pre valve closed
7/31/2011	11:00:13 PM	SiCl4 post valve closed
7/31/2011	11:00:13 PM	Bypass valve closed
7/31/2011	11:00:13 PM	Bubbler valve closed
7/31/2011	11:00:13 PM	Main Vac valve opened
7/31/2011	11:00:13 PM	Helium MFC set to  0.000000
7/31/2011	11:00:13 PM	H2 MFC set to  0.000000
7/31/2011	11:00:13 PM	BCl3 MFC set to  0.000000
7/31/2011	11:00:13 PM	PHl3 MFC set to  0.000000
7/31/2011	11:00:13 PM	SiCl4 MFC set to  0.000000
7/31/2011	11:00:13 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	11:00:13 PM	Tube furnace set to 120
7/31/2011	11:00:44 PM	H2 valve closed
7/31/2011	11:00:44 PM	BCl3 valve closed
7/31/2011	11:00:44 PM	PH3 valve closed
7/31/2011	11:00:44 PM	SiCl4 pre valve closed
7/31/2011	11:00:44 PM	SiCl4 post valve closed
7/31/2011	11:00:44 PM	Bypass valve closed
7/31/2011	11:00:44 PM	Bubbler valve closed
7/31/2011	11:00:44 PM	Helium valve opened
7/31/2011	11:00:44 PM	Main Vac valve opened
7/31/2011	11:00:44 PM	Helium MFC set to  20.000000
7/31/2011	11:00:44 PM	H2 MFC set to  0.000000
7/31/2011	11:00:44 PM	BCl3 MFC set to  0.000000
7/31/2011	11:00:44 PM	PHl3 MFC set to  0.000000
7/31/2011	11:00:44 PM	SiCl4 MFC set to  0.000000
7/31/2011	11:00:44 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	11:00:44 PM	Tube furnace set to 120
7/31/2011	11:01:14 PM	Helium valve closed
7/31/2011	11:01:14 PM	H2 valve closed
7/31/2011	11:01:14 PM	BCl3 valve closed
7/31/2011	11:01:14 PM	PH3 valve closed
7/31/2011	11:01:14 PM	SiCl4 pre valve closed
7/31/2011	11:01:14 PM	SiCl4 post valve closed
7/31/2011	11:01:14 PM	Bypass valve closed
7/31/2011	11:01:14 PM	Bubbler valve closed
7/31/2011	11:01:14 PM	Main Vac valve opened
7/31/2011	11:01:14 PM	Helium MFC set to  0.000000
7/31/2011	11:01:14 PM	H2 MFC set to  0.000000
7/31/2011	11:01:14 PM	BCl3 MFC set to  0.000000
7/31/2011	11:01:14 PM	PHl3 MFC set to  0.000000
7/31/2011	11:01:14 PM	SiCl4 MFC set to  0.000000
7/31/2011	11:01:14 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	11:01:14 PM	Tube furnace set to 120
7/31/2011	11:01:44 PM	H2 valve closed
7/31/2011	11:01:44 PM	BCl3 valve closed
7/31/2011	11:01:44 PM	PH3 valve closed
7/31/2011	11:01:44 PM	SiCl4 pre valve closed
7/31/2011	11:01:44 PM	SiCl4 post valve closed
7/31/2011	11:01:44 PM	Bypass valve closed
7/31/2011	11:01:44 PM	Bubbler valve closed
7/31/2011	11:01:44 PM	Helium valve opened
7/31/2011	11:01:44 PM	Main Vac valve opened
7/31/2011	11:01:44 PM	Helium MFC set to  20.000000
7/31/2011	11:01:44 PM	H2 MFC set to  0.000000
7/31/2011	11:01:44 PM	BCl3 MFC set to  0.000000
7/31/2011	11:01:44 PM	PHl3 MFC set to  0.000000
7/31/2011	11:01:44 PM	SiCl4 MFC set to  0.000000
7/31/2011	11:01:44 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	11:01:44 PM	Tube furnace set to 120
7/31/2011	11:02:14 PM	Helium valve closed
7/31/2011	11:02:14 PM	H2 valve closed
7/31/2011	11:02:14 PM	BCl3 valve closed
7/31/2011	11:02:14 PM	PH3 valve closed
7/31/2011	11:02:14 PM	SiCl4 pre valve closed
7/31/2011	11:02:14 PM	SiCl4 post valve closed
7/31/2011	11:02:14 PM	Bypass valve closed
7/31/2011	11:02:14 PM	Bubbler valve closed
7/31/2011	11:02:14 PM	Main Vac valve opened
7/31/2011	11:02:14 PM	Helium MFC set to  0.000000
7/31/2011	11:02:14 PM	H2 MFC set to  0.000000
7/31/2011	11:02:14 PM	BCl3 MFC set to  0.000000
7/31/2011	11:02:14 PM	PHl3 MFC set to  0.000000
7/31/2011	11:02:14 PM	SiCl4 MFC set to  0.000000
7/31/2011	11:02:14 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	11:02:14 PM	Tube furnace set to 120
7/31/2011	11:02:44 PM	H2 valve closed
7/31/2011	11:02:44 PM	BCl3 valve closed
7/31/2011	11:02:44 PM	PH3 valve closed
7/31/2011	11:02:44 PM	SiCl4 pre valve closed
7/31/2011	11:02:44 PM	SiCl4 post valve closed
7/31/2011	11:02:44 PM	Bypass valve closed
7/31/2011	11:02:44 PM	Bubbler valve closed
7/31/2011	11:02:44 PM	Helium valve opened
7/31/2011	11:02:44 PM	Main Vac valve opened
7/31/2011	11:02:44 PM	Helium MFC set to  20.000000
7/31/2011	11:02:44 PM	H2 MFC set to  0.000000
7/31/2011	11:02:44 PM	BCl3 MFC set to  0.000000
7/31/2011	11:02:44 PM	PHl3 MFC set to  0.000000
7/31/2011	11:02:44 PM	SiCl4 MFC set to  0.000000
7/31/2011	11:02:44 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	11:02:44 PM	Tube furnace set to 120
7/31/2011	11:03:14 PM	Helium valve closed
7/31/2011	11:03:14 PM	H2 valve closed
7/31/2011	11:03:14 PM	BCl3 valve closed
7/31/2011	11:03:15 PM	PH3 valve closed
7/31/2011	11:03:15 PM	SiCl4 pre valve closed
7/31/2011	11:03:15 PM	SiCl4 post valve closed
7/31/2011	11:03:15 PM	Bypass valve closed
7/31/2011	11:03:15 PM	Bubbler valve closed
7/31/2011	11:03:15 PM	Main Vac valve opened
7/31/2011	11:03:15 PM	Helium MFC set to  0.000000
7/31/2011	11:03:15 PM	H2 MFC set to  0.000000
7/31/2011	11:03:15 PM	BCl3 MFC set to  0.000000
7/31/2011	11:03:15 PM	PHl3 MFC set to  0.000000
7/31/2011	11:03:15 PM	SiCl4 MFC set to  0.000000
7/31/2011	11:03:15 PM	Bypass solenoid MFC set to  0.000000
7/31/2011	11:03:15 PM	Tube furnace set to 120
7/31/2011	11:03:16 PM	Run finished at 11:03 PM
